Abstract:Optical resonators with high quality factors (Qs) are promising for a variety of applications due to the enhanced nonlinearity and increased photonic density of states at resonances. In particular, frequency combs (FCs) can be generated through four-wave mixing in high-Q microresonators made from Kerr nonlinear materials such as silica, silicon nitride, magnesium fluoride, and calcium fluoride. These devices have potential for on-chip frequency metrology and high-resolution spectroscopy, high-bandwidth radiofrequency information processing, and high-data-rate telecommunications. Silicon nitride microresonators are attractive due to their compatibility with integrated circuit manufacturing; they can be cladded with silica for long-term stable yet tunable operation, and allow multiple resonators to be coupled together to achieve novel functionalities. Despite previous demonstrations of high-Q silicon nitride resonators, FC generation using silicon nitride microresonator chips still requires pump power significantly higher than those in whispering gallery mode resonators made from silica, magnesium, and calcium fluorides, which all have shown resonator Qs between 0.1 and 100 billion. Here, we report on a fabrication procedure that leads to the demonstration of "finger-shaped" Si3N4 microresonators with intrinsic Qs up to 17 million at a free spectrum range (FSR) of 24.7 GHz that are suitable for telecommunication and microwave photonics applications. The frequency comb onset power can be as low as 2.36 mW and broad, single FSR combs can be generated at a low pump power of 24 mW, both within reach of on-chip semiconductor lasers. Our demonstration is an important step toward a fully integrated on-chip FC source. (C) 2016 Optical Society of America

Coherent Frequency Comb Generation in a Silicon Nitride Microresonator with Anomalous Dispersion

Coherent frequency comb generation in a silicon nitride microresonator with anomalous dispersion

Frequency Comb Generation in 300 Nm-Thick Si 3 N 4 Concentric-Ring-Resonators

Kerr Combs from Normal and Anomalous Dispersion Silicon Nitride Microresonators

Coherent Kerr Frequency Comb Generation In Microresonators With Chi((2)) And Chi((3)) Nonlinearities

Frequency Comb Generation in 300 Nm Thick SiN Concentric-Racetrack-Resonators: Overcoming the Material Dispersion Limit

Dispersion Engineering and Frequency Comb Generation in Thin Silicon Nitride Concentric Microresonators.

Coherent Kerr frequency comb generation in microresonators with χ (2) and χ (3) nonlinearities

High-Q Silicon Nitride Microresonator for Low Power Frequency Comb Initiation at Normal Dispersion Regime

Broadband Visible Wavelength Microcomb Generation In Silicon Nitride Microrings Through Air-Clad Dispersion Engineering

Octave-spanning frequency comb generation in a silicon nitride chip

Investigation of mode coupling in normal-dispersion silicon nitride microresonators for Kerr frequency comb generation

Generation of Frequency-Degenerate Photon Pairs in a Bidirectionally Pumped Silicon Micro-Ring Resonator

Probing Within Partially Coherent Microcavity Frequency Combs via Optical Pulse Shaping

High-Q Silicon Nitride Microresonators Exhibiting Low-Power Frequency Comb Initiation

Fabrication of Silicon Nitride-Based Integrated Microcavity Optical Frequency Comb Devices

Anomalous Dispersion in 300 Nm-Thick Si3n4 Concentric-Ring-Resonators

Normal dispersion silicon oxynitride microresonator Kerr frequency combs

Intracavity characterization of micro-comb generation in the single-soliton regime

An Octave-Spanning Mid-Infrared Frequency Comb Generated in a Silicon Nanophotonic Wire Waveguide

Spectral line-by-line pulse shaping of on-chip microresonator frequency combs