Abstract:On-chip optical resonators have proven to be a promising platform for generating Kerr frequency combs. Whispering gallery mode resonators are particularly attractive because of their small footprint as well as low threshold and power consumption. This performance can be attributed to two characteristics: the cavity quality factor (Q) and the cavity dispersion. The input optical field into the cavity is amplified by the cavity Q, enabling nonlinear processes to occur with low input powers. In addition, the total span of the optical comb is governed by the dispersion. In an optical cavity-based comb, the dispersion is governed by the geometric dispersion of the cavity and the material dispersion. While many different materials have been explored, the realization of ultrahigh Q (UHQ) on-chip frequency comb sources is still challenging for most materials. One exception is the family of integrated silica devices. However, because the silica attracts water molecules from the ambient environment, the lifetime of the device performance is fundamentally limited, unless packaged in a controlled atmosphere. Here, we demonstrate the generation of environmentally stable frequency combs fabricated from SiO1.7N0.13 microtoroidal resonators. Due to the UHQ factors of the cavities, parametric oscillations with submicrowatt thresholds are demonstrated. Based on their geometry and material properties, the cavities have normal dispersion. However, due to avoided mode crossing, frequency combs are generated. Finally, unlike SiO2, SiO1.7N0.13 inhibits the formation of a water monolayer, allowing submicrowatt performance to be maintained for over a week in devices stored with minimal environmental controls.

Coherent frequency comb generation in a silicon nitride microresonator with anomalous dispersion

Coherent Frequency Comb Generation in a Silicon Nitride Microresonator with Anomalous Dispersion

Kerr Combs from Normal and Anomalous Dispersion Silicon Nitride Microresonators

Frequency Comb Generation in 300 Nm Thick SiN Concentric-Racetrack-Resonators: Overcoming the Material Dispersion Limit

Frequency Comb Generation in 300 Nm-Thick Si 3 N 4 Concentric-Ring-Resonators

Coherent Kerr frequency comb generation in microresonators with χ (2) and χ (3) nonlinearities

Coherent Kerr Frequency Comb Generation In Microresonators With Chi((2)) And Chi((3)) Nonlinearities

Dispersion Engineering and Frequency Comb Generation in Thin Silicon Nitride Concentric Microresonators.

Octave-spanning frequency comb generation in a silicon nitride chip

Broadband Visible Wavelength Microcomb Generation In Silicon Nitride Microrings Through Air-Clad Dispersion Engineering

Investigation of mode coupling in normal-dispersion silicon nitride microresonators for Kerr frequency comb generation

Soliton frequency comb generation in CMOS-compatible silicon nitride microresonators

High-Q Silicon Nitride Microresonator for Low Power Frequency Comb Initiation at Normal Dispersion Regime

Frequency Comb-Enhanced Coupling In Silicon Nitride Microresonators

Probing Within Partially Coherent Microcavity Frequency Combs via Optical Pulse Shaping

Deuterated silicon nitride photonic devices for broadband optical frequency comb generation

An Octave-Spanning Mid-Infrared Frequency Comb Generated in a Silicon Nanophotonic Wire Waveguide

Spectral line-by-line pulse shaping of on-chip microresonator frequency combs

Fabrication of Silicon Nitride-Based Integrated Microcavity Optical Frequency Comb Devices

Intracavity characterization of micro-comb generation in the single-soliton regime

Normal dispersion silicon oxynitride microresonator Kerr frequency combs