Frequency Comb-Enhanced Coupling In Silicon Nitride Microresonators

peihsun wang,yi xuan,xiaoxiao xue,yang liu,jian wang,daniel e leaird,minghao qi,andrew m weiner

DOI: https://doi.org/10.1364/cleo_qels.2015.fth1d.4

2015-01-01

Abstract:We investigate enhanced coupling of the pump laser as a result of power transfer to the frequency comb in a silicon nitride microring designed with an over-coupled bus-waveguide. (C) 2015 Optical Society of America

What problem does this paper attempt to address?

Frequency Comb-Induced Nonlinear Coupling Effect in Microresonators

Pei-Hsun Wang,Yi Xuan,Leo Tom Varghese,Li Fan,Jian Wang,Daniel E. Leaird,Minghao Qi,Andrew M. Weiner

DOI: https://doi.org/10.1109/ipcon.2013.6656520

2013-01-01

Abstract:We investigate a nonlinear coupling effect which results from frequency comb-induced pump saturation in a silicon nitride microring cavity fabricated with both through-and drop-ports.
Optical Frequency Comb in Silicon Nitride Microresonator(invited)

Li Jin,Wang Piyu,Wang Zhengyu,Niu Rui,Wan Shuai,Guo Guangcan,Dong Chunhua

DOI: https://doi.org/10.3788/irla20220302

2022-01-01

Infrared and Laser Engineering

Abstract:Optical resonators with high quality (Q) factor can restrict light in a small mode volume for a long time, greatly enhancing the interaction between light and matter, and becoming an important component with great potential in integrated optical devices. Focusing on the silicon nitride material platform, which is currently widely used in the field of integrated nonlinear optics, in order to solve the problem of large scattering loss in the large size on-chip silicon nitride microring resonator caused by the stitching error, the surface roughness and other factors, a series of fabrication process improvements were made to improve the quality factor of the large size silicon nitride microring resonator. The results show that the scattering loss of the silicon nitride waveguide can be effectively reduced by thin film redeposition process, and the intrinsic Q of the large size silicon nitride microring resonator with a radius of 560 μm is increased by 26% on average. Thanks to the improved Q of the large size microring resonator, the frequency comb with the repetition rate of 40 GHz is realized in the on-chip silicon nitride microring resonator.
Octave-spanning frequency comb generation in a silicon nitride chip

Yoshitomo Okawachi,Kasturi Saha,Jacob S. Levy,Y. Henry Wen,Michal Lipson,Alexander L. Gaeta

DOI: https://doi.org/10.1364/ol.36.003398

IF: 3.6

2011-08-26

Optics Letters

Abstract:We demonstrate a frequency comb spanning an octave via the parametric process of cascaded four-wave mixing in a monolithic, high-Q silicon nitride microring resonator. The comb is generated from a single-frequency pump laser at 1562 nm and spans 128 THz with a spacing of 226 GHz, which can be tuned slightly with the pump power. In addition, we investigate the RF amplitude noise characteristics of the parametric comb and find that the comb can operate in a low-noise state with a 30 dB reduction in noise as the pump frequency is tuned into the cavity resonance.

optics
Coherent frequency comb generation in a silicon nitride microresonator with anomalous dispersion

peihsun wang,yi xuan,jian wang,xiaoxiao xue,daniel e leaird,minghao qi,andrew m weiner

DOI: https://doi.org/10.1364/cleo_si.2014.sf2e.3

2014-01-01

Abstract:We observe a transition to a coherent-comb state in a SiN-microresonator with anomalous dispersion. Although ~300 fs pulse trains are generated after line-by-line shaping, the intensity within the microring does not appear to be pulse-like.
High-Q Silicon Nitride Microresonators Exhibiting Low-Power Frequency Comb Initiation

Yi Xuan,Yang Liu,Leo T. Varghese,Andrew J. Metcalf,Xiaoxiao Xue,Pei-Hsun Wang,Kyunghun Han,Jose A. Jaramillo-Villegas,Abdullah Al Noman,Cong Wang,Sangsik Kim,Min Teng,Yun Jo Lee,Ben Niu,Li Fan,Jian Wang,Daniel E. Leaird,Andrew M. Weiner,Minghao Qi

DOI: https://doi.org/10.1364/optica.3.001171

IF: 10.4

2016-01-01

Optica

Abstract:Optical resonators with high quality factors (Qs) are promising for a variety of applications due to the enhanced nonlinearity and increased photonic density of states at resonances. In particular, frequency combs (FCs) can be generated through four-wave mixing in high-Q microresonators made from Kerr nonlinear materials such as silica, silicon nitride, magnesium fluoride, and calcium fluoride. These devices have potential for on-chip frequency metrology and high-resolution spectroscopy, high-bandwidth radiofrequency information processing, and high-data-rate telecommunications. Silicon nitride microresonators are attractive due to their compatibility with integrated circuit manufacturing; they can be cladded with silica for long-term stable yet tunable operation, and allow multiple resonators to be coupled together to achieve novel functionalities. Despite previous demonstrations of high-Q silicon nitride resonators, FC generation using silicon nitride microresonator chips still requires pump power significantly higher than those in whispering gallery mode resonators made from silica, magnesium, and calcium fluorides, which all have shown resonator Qs between 0.1 and 100 billion. Here, we report on a fabrication procedure that leads to the demonstration of "finger-shaped" Si3N4 microresonators with intrinsic Qs up to 17 million at a free spectrum range (FSR) of 24.7 GHz that are suitable for telecommunication and microwave photonics applications. The frequency comb onset power can be as low as 2.36 mW and broad, single FSR combs can be generated at a low pump power of 24 mW, both within reach of on-chip semiconductor lasers. Our demonstration is an important step toward a fully integrated on-chip FC source. (C) 2016 Optical Society of America
Silicon Micro-Cavities And Their System Applications

Min Qiu,Qiang Li,Ziyang Zhang,Fangfei Liu,Qingjiang Chang,Yikai Su

DOI: https://doi.org/10.1117/12.813540

2009-01-01

Abstract:We experimentally demonstrate resonance-splitting and enhanced notch as a result of the mutual mode coupling in silicon ring resonator. Dense wavelength conversions, wavelength multicasting and optical up-converter are demonstrated in the split silicon ring resonator. A temporal differentiator and format conversion from NRZ to AMI are demonstrated utilizing the filtering effect of ring resonator. Photonic phase shifter and delay line are demonstrated utilizing the phase shift of ring resonator.
Laser Soliton Microcombs Heterogeneously Integrated on Silicon

Chao Xiang,Junqiu Liu,Joel Guo,Lin Chang,Rui Ning Wang,Wenle Weng,Jonathan Peters,Weiqiang Xie,Zeyu Zhang,Johann Riemensberger,Jennifer Selvidge,Tobias J. Kippenberg,John E. Bowers

DOI: https://doi.org/10.1126/science.abh2076

IF: 56.9

2021-01-01

Science

Abstract:Silicon photonics enables wafer-scale integration of optical functionalities on chip. Silicon-based laser frequency combs can provide integrated sources of mutually coherent laser lines for terabit-per-second transceivers, parallel coherent light detection and ranging, or photonics-assisted signal processing. We report heterogeneously integrated laser soliton microcombs combining both indium phospide/silicon (InP/Si) semiconductor lasers and ultralow-loss silicon nitride (Si3N4) microresonators on a monolithic silicon substrate. Thousands of devices can be produced from a single wafer by using complementary metal-oxide-semiconductor-compatible techniques. With on-chip electrical control of the laser-microresonator relative optical phase, these devices can output single-soliton microcombs with a 100-gigahertz repetition rate. Furthermore, we observe laser frequency noise reduction due to self-injection locking of the InP/Si laser to the Si3N4 microresonator. Our approach provides a route for large-volume, low-cost manufacturing of narrow-linewidth, chip-based frequency combs for next-generation high-capacity transceivers, data centers, space and mobile platforms.
Generation of Frequency-Degenerate Photon Pairs in a Bidirectionally Pumped Silicon Micro-Ring Resonator

Hongmei Ma,Li’ao Ye,Fei Ruan,Maohui Li,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1117/12.3003997

2023-01-01

Abstract:Integrated silicon micro-ring resonator (MRR) has been widely used as on-chip single photon source. In this paper, we introduce an approach to generate frequency-degenerate photons by bidirectionally pumping an add-drop micro-ring resonator (MRR) within a Sagnac loop configuration. This scheme facilitates the concurrent generation of photon pairs from both clockwise (CW) and counterclockwise (CCW) directions, transforming a single MRR into a dual-source system. Through CMOS fabrication techniques, we realized the proposed device and conducted measurements of key parameters including the single side count rate (SSCR), coincidence count rate (CCR), and coincidence-to-accidental coincidence ratio (CAR) for both directional outputs. Notably, the CCRs exhibit remarkable similarity between the two sources, reaching approximately 550 Hz at an waveguide power of 0.59 mW. Furthermore, we observed a differential CAR, with the CCW direction yielding a lower value compared to the CW direction, with estimated maxima of 161 and 387, respectively. These findings underscore the viability of utilizing a singular MRR as a dual-source entity. Additionally, we outline the design of an on-chip structure for heralded Hong-Ou-Mandel (HOM) interference, necessitating 4-fold coincidences.Our work holds the promise of advancing the realm of large-scale integrated quantum photonic chips.
High-Q Silicon Nitride Microresonator for Low Power Frequency Comb Initiation at Normal Dispersion Regime

Yi Xuan,Yang Liu,Xiaoxiao Xue,Pei-Hsun Wang,Jian Wang,Ben Niu,Kyunghun Han,Min Teng,Daniel E. Leaird,Andrew M. Weiner,Minghao Qi

DOI: https://doi.org/10.1364/cleo_si.2015.stu1i.6

2015-01-01

Abstract:SiN micro-resonators with a cross section of 3x0.6 mu m(2) and an FSR of 25 GHz were demonstrated with intrinsic Qs up to 17 million, showing frequency comb onset power as low as 5.6 mW.
Fabrication of Silicon Nitride-Based Integrated Microcavity Optical Frequency Comb Devices

Zhu Zhendong,Lin Pingwei,Sun Zhaoyang,Bai Benfeng,Wang Xueshen

DOI: https://doi.org/10.3788/irla20220214

2022-01-01

Infrared and Laser Engineering

Abstract:Microcavity optical frequency comb (also called the microcavity comb), a subversive technology, is an integrated light source produced from a four-wave mixing process in a nonlinear optical microcavity. As a precision device with excellent properties of optical frequency, microcavity combs can be extensively applied in many fields such as molecular spectroscopy, coherent communication, LiDAR, metrology, and lightweight equipment for airborne system. Here, the fabrication of integrated silicon nitride (Si3N4) microcavity optical frequency comb devices was reported. The balance between the stress, thickness and stoichiometry of Si3N4 was well controlled. A reliable method was proposed to fabricate Si3N4 optical film with enough thickness and stoichiometry to meet the requirements of anomalous dispersion and reducing light absorption. The modified technology of Damascene process with microstructures to decline the stress of thick Si3N4 film was developed to reduce defects. Furthermore, the mask via with a 30 nm thick alumina compensation layer was optimized and a practicable etching process was used for fabricating Si3N4 microresonators with sub-15 nm roughness of lateral walls of microring and waveguide. The experimental results show a high quality of Si3N4 microcavity. Additionally, a coherent Kerr optical frequency comb spectrum can be produced with a wide spectral range from 1480 nm to 1640 nm via dual light pumping.
High-efficiency and Broadband Electro-Optic Frequency Combs Using Coupled Lithium-Niobate Microresonators

Yaowen Hu,Mengjie Yu,Brandon Buscaino,Neil Sinclair,Di Zhu,Amirhassan Shams-Ansari,Linbo Shao,Mian Zhang,Joseph M. Kahn,Marko Loncar

DOI: https://doi.org/10.1364/cleo_si.2021.stu2g.2

2021-01-01

Abstract:We demonstrate an electro-optic frequency comb source, based on coupled lithium niobate microresonators, with a factor of 100× higher pump-to-comb conversion efficiency (30%) and 2.4× broader optical bandwidth (117 nm), as compared to the previous broadest electro-optic frequency comb.
Laser soliton microcombs on silicon

Chao Xiang,Junqiu Liu,Joel Guo,Lin Chang,Rui Ning Wang,Wenle Weng,Jonathan Peters,Weiqiang Xie,Zeyu Zhang,Johann Riemensberger,Jennifer Selvidge,Tobias J. Kippenberg,John E. Bowers

DOI: https://doi.org/10.48550/arXiv.2103.02725

2021-03-03

Optics

Abstract:Silicon photonics enables wafer-scale integration of optical functionalities on chip. A silicon-based laser frequency combs could significantly expand the applications of silicon photonics, by providing integrated sources of mutually coherent laser lines for terabit-per-second transceivers, parallel coherent LiDAR, or photonics-assisted signal processing. Here, we report on heterogeneously integrated laser soliton microcombs combining both InP/Si semiconductor lasers and ultralow-loss silicon nitride microresonators on monolithic silicon substrate. Thousands of devices are produced from a single wafer using standard CMOS techniques. Using on-chip electrical control of the microcomb-laser relative optical phase, these devices can output single-soliton microcombs with 100 GHz repetition rate. Our approach paves the way for large-volume, low-cost manufacturing of chip-based frequency combs for next-generation high-capacity transceivers, datacenters, space and mobile platforms.
Sub-milliwatt optical frequency combs in dual-pumped high-Q multimode silicon resonators

Yaojing Zhang,Keyi Zhong,Gaolei Hu,Dan Yi,Rakesh Ranjan Kumar,Ki Tsang,Hon Ki Tsang

DOI: https://doi.org/10.1063/5.0025490

IF: 4

2020-11-30

Applied Physics Letters

Abstract:We experimentally study the generation of optical frequency combs (OFCs) in dual-pumped high-quality factor (>10<sup>6</sup>) multimode silicon racetrack resonators and show that sub-milliwatt (0.3 mW) input pump powers were sufficient to produce six-order OFC generation with eleven peaks, even in waveguides with normal dispersion. The low pump power and enhanced efficiency of the OFC generation can be attributed to mode coupling between two mode families of the multimode resonator, which acts to change the effective magnitude and the sign of the local dispersion of the resonator. We experimentally observed that the OFC generation had 3.6 times more peaks and 12.1 dB higher conversion efficiency than that without any bias. We compared the efficiencies of the OFC generation at different pump wavelengths within and beyond the mode coupling region. At low pump powers circulating in the resonator, pump wavelengths in the mode coupling regime produced 1.3 times more peaks and 8 dB enhancement in conversion efficiency than pumping beyond the mode coupling regime. The experimental results were consistent with the theoretical simulations by solving the modified Lugiato–Lefever equation.

physics, applied
Robust and Controllable Generation of Frequency Combs in Microresonators with Selected Sideband Feedback

Yufeng Jiang,Xin Zhao,Jian Wang,Ben Niu,Ya Liu,Guoqing Hu,Pei-Hsun Wang,Minghao Qi,Andrew M. Weiner,Zheng

DOI: https://doi.org/10.1364/ofc.2014.th2a.57

2014-01-01

Abstract:With feedback and amplification at selected sidebands of a SiN microring spectrum, we achieve controllable line spacing in the generated comb under relaxed pumping conditions. Such reduced pump power requirement is beneficial for many applications.
Quantum Optical Frequency Combs Generated in Micro-ring Resonator with a 20-Ghz FSR

Zhe Deng,Xi-Xian Du,Yun-Ru Fan,Hong Zeng,Peng Wu,Jin Guo,Xuegong Zhao,Guangwei Deng,Haizhi Song,You Wang,Juan-Juan Zeng,Li-Xing You,Zhen Wang,Guang-Can Guo,Qiang Zhou

DOI: https://doi.org/10.1109/ogc62429.2024.10738756

2024-01-01

Abstract:We demonstrate the generation of quantum optical frequency combs in silicon nitride micro-ring resonator with a FSR of 20 GHz. The correlation properties of two-photon state carried by each wavelength pair are measured. Correlated photon pairs at 71 wavelength pairs are obtained in our experiment.
Frequency Comb Generation in the Green Using Silicon Nitride Microresonators

Leiran Wang,Lin Chang,Nicolas Volet,Martin H. P. Pfeiffer,Michael Zervas,Hairun Guo,Tobias J. Kippenberg,John E. Bowers

DOI: https://doi.org/10.1002/lpor.201600006

2016-01-01

LASER & PHOTONICS REVIEWS

Abstract:Optical frequency combs enable precision measurements in fundamental physics and have been applied to a growing number of applications, such as molecular spectroscopy, LIDAR and atmospheric trace‐gas sensing. In recent years, the generation of frequency combs has been demonstrated in integrated microresonators. Extending their spectral range to the visible is generally hindered by strong normal material dispersion and scattering losses. In this paper, we report the first realization of a green‐light frequency comb in integrated high‐Q silicon nitride (SiN) ring microresonators. Third‐order optical non‐linearities are utilized to convert a near‐infrared Kerr frequency comb to a broadband green light comb. The 1‐THz frequency spacing infrared comb covers up to 2/3 of an octave, from 144 to 226 THz (or 1327‐2082 nm), and the simultaneously generated green‐light comb is centered around 570‐580 THz (or 517‐526 nm), with comb lines emitted down to 517 THz (or 580 nm) and up to 597 THz (or 502 nm). The green comb power is estimated to be as high as −9.1 dBm in the bus waveguide, with an on‐chip conversion efficiency of −34 dB. The proposed approach substantiates the feasibility of on‐chip optical frequency comb generation expanding to the green spectral region or even shorter wavelengths.
Soliton frequency comb generation in CMOS-compatible silicon nitride microresonators

Yaozu Xie,Jiaqi Li,Yanfeng Zhang,Zeru Wu,Shihao Zeng,Shuqing Lin,Zhaoyang Wu,Wenchao Zhou,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/PRJ.454816

IF: 7.6

2022-05-03

Photonics Research

Abstract:The monolithic integration of soliton microcomb devices with active photonic components and high-frequency electronics is highly desirable for practical applications. Among many materials, silicon nitride ( SiNx ) waveguide layers prepared by low-pressure chemical vapor deposition (LPCVD) have been the main platform for on-chip optical frequency comb generation. However, the high temperatures involved in LPCVD render it incompatible as a back-end process with complementary metal oxide semiconductor (CMOS) or active III-V compound semiconductor fabrication flows. We report the generation of coherent soliton frequency combs in micro-ring resonators fabricated in deuterated silicon nitride ( SiNx:D ) waveguides with a loss of 0.09 dB/cm. Deposited at 270°C by an inductance-coupled plasma chemical vapor deposition (ICP-CVD) process, the material preparation and fabrication flow are fully CMOS-compatible. These results enable the integration of silicon-nitride-based optical combs and photonic integrated circuits (PICs) on prefabricated CMOS and/or III-V substrates, therefore marking a major step forward in SiNx photonic technologies. © 2022 Chinese Laser Press

optics
Optical communication test of multiple-wavelength comb source from silicon nitride microresonators

peihsun wang,fahmida ferdous,houxun miao,jian wang,daniel e leaird,kartik srinivasan,lei chen,vladimir a aksyuk,andrew m weiner

DOI: https://doi.org/10.1109/IPCon.2012.6358493

2012-01-01

Abstract:We evaluate the optical communication performance of individual comb lines generated in silicon nitride microresonators. A high coherence mode yields error-free communications at 10 Gb/s, while a partially coherent mode results in closed eye diagrams.
Optical frequency comb generation from aluminum nitride micro-ring resonator

Hojoong Jung,Chi Xiong,King Y. Fong,Xufeng Zhang,Hong X. Tang

DOI: https://doi.org/10.48550/arXiv.1307.6761

2013-07-25

Optics

Abstract:Aluminum nitride is an appealing nonlinear optical material for on-chip wavelength conversion. Here we report optical frequency comb generation from high quality factor aluminum nitride micro-ring resonators integrated on silicon substrates. By engineering the waveguide structure to achieve near-zero dispersion at telecommunication wavelengths and optimizing the phase matching for four-wave mixing, frequency combs are generated with a single wavelength continuous-wave pump laser. The Kerr coefficient (n2) of aluminum nitride is further extracted from our experimental results.

Frequency Comb-Enhanced Coupling In Silicon Nitride Microresonators

Frequency Comb-Induced Nonlinear Coupling Effect in Microresonators

Optical Frequency Comb in Silicon Nitride Microresonator(invited)

Octave-spanning frequency comb generation in a silicon nitride chip

Coherent frequency comb generation in a silicon nitride microresonator with anomalous dispersion

High-Q Silicon Nitride Microresonators Exhibiting Low-Power Frequency Comb Initiation

Silicon Micro-Cavities And Their System Applications

Laser Soliton Microcombs Heterogeneously Integrated on Silicon

Generation of Frequency-Degenerate Photon Pairs in a Bidirectionally Pumped Silicon Micro-Ring Resonator

High-Q Silicon Nitride Microresonator for Low Power Frequency Comb Initiation at Normal Dispersion Regime

Fabrication of Silicon Nitride-Based Integrated Microcavity Optical Frequency Comb Devices

High-efficiency and Broadband Electro-Optic Frequency Combs Using Coupled Lithium-Niobate Microresonators

Laser soliton microcombs on silicon

Sub-milliwatt optical frequency combs in dual-pumped high-Q multimode silicon resonators

Robust and Controllable Generation of Frequency Combs in Microresonators with Selected Sideband Feedback

Quantum Optical Frequency Combs Generated in Micro-ring Resonator with a 20-Ghz FSR

Frequency Comb Generation in the Green Using Silicon Nitride Microresonators

Soliton frequency comb generation in CMOS-compatible silicon nitride microresonators

Optical communication test of multiple-wavelength comb source from silicon nitride microresonators

Optical frequency comb generation from aluminum nitride micro-ring resonator