Architecture for Integrated Mems Resonators Quality Factor Measurement

H. Mathias,F. Parrain,J. -P. Gilles,S. Megherbi,M. Zhang,Ph. Coste,A. Dupret,J.-P. Gilles
DOI: https://doi.org/10.48550/arXiv.0802.3767
2008-02-26
Other Computer Science
Abstract:In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).
What problem does this paper attempt to address?