Connecting Q to TCF for MEMS and piezoelectric resonators

S. McHugh

2024-07-13

Abstract:Two critical characteristics for any MEMS resonator are the quality factor ($Q$) and the temperature coefficient of frequency ($TCF$). The connection between $Q$ and $TCF$ is demonstrated here with a phenomenological anharmonic oscillator model. Specifically, it is shown that the same nonlinear terms responsible for the $TCF$ set an upper limit on the resonator's $Q$. A concise formula is found to estimate this loss and is shown to be closely related to Woodruff's formula for Akhiezer damping. The use of this formula is illustrated by extending the model to an important class of MEMS; piezoelectric resonators. Finally, the model is applied to published data for an AlN-on-diamond piezoelectric resonator. The focus here is on MEMS resonators, but the method should apply broadly to any resonance with non-zero $TCF$.

Mesoscale and Nanoscale Physics,Classical Physics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to understand the relationship between the quality factor \(Q\) of micro - electro - mechanical systems (MEMS) resonators and the temperature - frequency coefficient (TCF). Specifically, the author explains the connection between TCF and \(Q\) by introducing a nonlinear oscillator model and shows that the same nonlinear term not only determines TCF but also sets the upper limit of \(Q\).

### Detailed description of the main problems

1. **Relationship between quality factor \(Q\) and temperature - frequency coefficient TCF**:
- Two key characteristics of MEMS resonators are the quality factor \(Q\) and the temperature - frequency coefficient (TCF). \(Q\) represents the energy loss rate of the resonator, while TCF describes the influence of temperature on the resonant frequency.
- By introducing a classical nonlinear oscillator model, the author shows the internal relationship between TCF and \(Q\). In particular, the same nonlinear term affects both TCF and limits the upper limit of \(Q\).

2. **Effect of nonlinear loss on \(Q\)**:
- The nonlinear term causes energy to scatter from the main mode to higher - order modes, resulting in energy loss. This nonlinear loss mechanism sets the upper limit of \(Q\).
- The author derives a concise formula to estimate this loss and compares it with Woodruff's Akhiezer attenuation formula, finding that the two are very similar at low temperatures.

3. **Application and verification of the model**:
- The model is extended and applied to piezoelectric resonators (a widely used type of MEMS) and verified by published data. Specifically, the author analyzes the data of an AlN - on - diamond piezoelectric resonator, and the results show that the model is reasonably consistent with the experimental data.

4. **Comparison between theory and actual measurement**:
- The study finds that at low temperatures, thermal nonlinear loss is not the main factor limiting \(Q\); near room temperature, the measured \(Q\) is close to the upper limit \(Q_A\) predicted by the model, indicating that nonlinear conditions (such as the nonlinear characteristics of materials, large static displacements, and geometric nonlinearities) have a significant impact on \(Q\) under these conditions.

### Summary

The main objective of this paper is to reveal the internal relationship between TCF and \(Q\) in MEMS resonators by introducing a nonlinear oscillator model and to provide a method for estimating the upper limit of \(Q\). This research helps to understand the impact of nonlinear effects on resonator performance and provides a theoretical basis for designing resonators with better temperature stability.