Drift compensation system of an autocollimator based on reciprocal roll angles and a feedback combination target

Kun Li,Guohua Cao,Hongchang Ding,Han Hou

DOI: https://doi.org/10.1364/ao.539864

IF: 1.9

2024-11-08

Applied Optics

Abstract:Kun Li, Guohua Cao, Hongchang Ding, Han Hou To address the issues of limited field of view and beam drift in traditional autocollimation measurements, a novel, to our knowledge, ... [Appl. Opt. 63, 8465-8474 (2024)]

optics

What problem does this paper attempt to address?

Laser Collimation Method Based on Differential Compensating Beam Drift

KUANG Cui-fang,HAO Xiang,WANG Ting-ting

DOI: https://doi.org/10.16136/j.joel.2011.04.013

2011-01-01

Abstract:Beam drift is the uppermost factor that affects the accuracy of the propagating direction of a laser beam.It causes serious error in laser straightness or coaxiality measurement at a long distance.A novel differential compensation approach for laser beam drift is put forward in this paper.A beam splitter was used as a position-sentivie part.The first reflected beam from the splitter was detected using a four-quadrant detector.The second reflected beam from reverse direction by the splitter was detected using another four-quadrant detector,after it had been reflected by a cat′s eye reflector.The beam drift influence on beam collimation can be eliminated by combining the two detectors.Experimental results show that the additional position error induced by beam drift can be reduced by about 35.0-57.0% in the range of 8-18 m distance.
High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

Cuifang Kuang,En Hong,Qibo Feng

DOI: https://doi.org/10.1117/1.2740137

IF: 1.3

2007-01-01

Optical Engineering

Abstract:A single method for simultaneously measuring 2-D rotational angles is proposed by using a collimation laser. Compared with the traditional autocollimator measurement method, the proposed method can also be applied to longer distance and higher precision angular measurement. The 2-D angular drift of the reference datum beam is suppressed by a factor of 10 via expansion. A traditional single lens in front of the detector is replaced by combination lenses to increase the sensitivity and compactibility. The measurement principle of the 2-D angles is also analyzed. The feasibility and stability of the presented system are verified by comparison with the Renishaw ML10 laser interference measuring system. The experimental results show that the linear correlativity is 0.99999 and the point-to-point standard deviation error is less than +/- 0.2 arcsec in a +/- 60-arcsec range and 2000-mm distance. This proposal is most advantageous for simultaneous long distance and high accuracy of 2-D angular errors measurement of a linear guide manner. (C) 2007 Society of Photo-Optical Instrumentation Engineers.
Small Angular Displacement Measurement Based on an Autocollimator and a Common-Path Compensation Principle.

Ke Li,Cuifang Kuang,Xu Liu

DOI: https://doi.org/10.1063/1.4773004

IF: 1.6

2013-01-01

Review of Scientific Instruments

Abstract:A novel method for small angular displacement measurement based on an autocollimator and a common-path compensation principle by using single CCD detector was proposed. The principles of the angular displacement measurement and the common-path compensation were analyzed. The feasibility of measurement method was verified and the experimental results revealed that the linear correlativity between the relative displacement of the measuring beam spot and the angular displacement is 0.99996. And the measurement resolution is about 0.03 arcsec. To test the compensation's effect, a series of experiments introducing three different interferences from system and external environment were performed. The experimental results indicated that the standard deviations of the measuring beam spot's angular drift were improved by at least 25.0% to at most 80.0% in x direction while by at least 28.2% to at most 95.6% in y direction. Thus, the stability of the system and the measurement resolution were improved.
Four Degree-Of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift

Feng Qibo,Zhang Bin,Kuang Cuifang

IF: 2.0411

2008-01-01

International Journal of Precision Engineering and Manufacturing

Abstract:A precision four-degree-of-freedom measurement system has been developed for simulataneous measurement of four motion errors of a linear stage, which include straightness and angular errors. The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about +/- 1.5 mu m within the measuring range of +/- 650 mu m, and the accuracy for pitch and yaw measurements is about +/- 1.5 arc-seconds within the range of +/- 600 arc-seconds.
Roll angle measurement based on common path compensation principle

yiwei zhu,shaocong liu,cuifang kuang,shuai li,xu liu

DOI: https://doi.org/10.1016/j.optlaseng.2014.11.006

IF: 5.666

2015-01-01

Optics and Lasers in Engineering

Abstract:We propose a novel and compact roll angle displacement measurement method based on collimated laser position measurement and the common path compensation principle. The principles of the roll angle displacement measurement and the common path compensation are analyzed. The feasibility of the measurement method is verified, and the experimental results revealed a linear correlation coefficient of 0.99995 between the relative displacement of the measuring beam spot and the angular displacement. Furthermore, the theoretical measurement resolution is 0.013 arcsec. To test the performance of the compensation, a series of experiments, including one system stability experiment and two different environmental interference experiments, were performed. The experimental results indicated that the standard deviations of the measuring beam spot’s angular drift were improved by 82.6–87.2%. Thus, the stability of the system and the measurement resolution were improved.
A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

Cuifang Kuang,En Hong,Jun Ni

DOI: https://doi.org/10.1063/1.2786272

IF: 1.6

2007-01-01

Review of Scientific Instruments

Abstract:A novel sensitivity improving method for simultaneously measuring five-degree-of-freedom errors of a moving linear stage is proposed based on collimator and interferometry techniques. The measuring principle and parameters of the system are analyzed theoretically. The experimental results proved that the resolution of the linear displacement of the proposed method has twice that of the current linear interferometer, and the resolutions of the two-dimensional straightness error measurement can be improved by a factor of 8 compared with the movement of the retroreflector itself by using multireflection and lens magnification. The resolutions of the pitch and yaw angular error measurement have been improved by a factor of 10 compared with the rotation of the plane mirror itself by using expander lenses. The whole measuring system is characterized of simple structure, small volume, and high precision. The moving component of the measurement system is wireless, which eliminates the errors and inconvenience introduced by the wire connection. Calibration and comparison tests of this system compared with Renishaw laser interferometer system have been carried out. Experimental results show good consistency for measuring a linear guide way.
Measuring Straightness Method with Common Path Compensation for Laser Drift

KUANG Cui-fang,FENG Qi-bo,LIU Bin,ZHANG Bin

DOI: https://doi.org/10.3969/j.issn.1003-501x.2005.04.009

2005-01-01

Abstract:Atmosphere turbulence is the major factor that affects the accuracy of the propagating direction of a laser beam, and causes serious errors in laser straightness measurement at long distance. A simple method of suppression of laser drift caused by air turbulence is put forward in the paper. With corner retro-reflector as position detector, the linearity error caused by reflection light of the corner retro-reflector is detected by a quadrant detector. 2-D position-sensitive detector and a lens are used to monitor angular drift caused by air turbulence. Experimental results show that the additional position error induced by air turbulence can be reduced by about 75%. Two-dimensional errors caused by air turbulence can be compensated simultaneously through common path.
A Systemic Model for Simultaneously Measuring Three dimensional Rotation Angles of the Linear Guide Track [J]

Cui-fang KUANG,Shi-qian CHEN,Qi-bo FENG,Zhi-feng ZHANG

2005-01-01

Abstract:A novel method for simultaneously measuring three-dimensional small angles is presented through adopting laser collimation technique and ray combination method. The systemic model for measuring three-dimensional rotation angles of the linear guide track is established based on two pentaprisms, two mirrors and two photoelectric detectors. All measuring parameters are analysed theoretically in detail. The results show that the systemic model is feasible. The resolutions of the angles can reach to 0.07 ″, when the system parameters apply to the values supposed. The whole measuring system is characterized of simple structure and high precision. The analysis results can provide theoretical basis and reference for system design.
A Software-Compensation Method to Orthogonal Magnetic Field Drift in A Depolarized Fiber-Optic Gyroscope

Dengwei Zhang,Yuxiang Zhao,Wenqing Zhou,Wenlan Fu,Cheng Liu,Xiaowu Shu,Shuangliang Che

DOI: https://doi.org/10.1016/j.ijleo.2013.10.095

IF: 3.1

2014-01-01

Optik

Abstract:An orthogonal magnetic field vertical to the light propagating direction will initiate a nonreciprocal phase drift in a depolarized interferometric fiber-optic gyroscope (D-IFOG). This drift appears a linear correlation to the magnitude of the orthogonal magnetic field. We proposed a software-compensation method by attaching two differential Hall sensors to the D-IFOG to sample the magnetic field in real time and the experimental results showed a notable improvement to the magnetic stability.
Error Modeling and Compensation of Circular Motion on a New Circumferential Drilling System

Qiang Fang,Yu-Chao Li,Shao-Hua Fei,Yong-Wei Han,Ying-Lin Ke

DOI: https://doi.org/10.1155/2015/286796

IF: 1.43

2015-01-01

Mathematical Problems in Engineering

Abstract:A new flexible circumferential drilling system is proposed to drill on the fuselage docking area. To analyze the influence of the circular motion error to the drilling accuracy, the nominal forward kinematic model is derived using Denavit-Hartenberg (D-H) method and this model is further developed to model the kinematic errors caused by circular positioning error and synchronization error using homogeneous transformation matrices (HTM). A laser tracker is utilized to measure the circular motion error of the two measurement points at both sides. A circular motion compensation experiment is implemented according to the calculated positioning error and synchronization error. Experimental results show that the positioning error and synchronization error were reduced by 65.0% and 58.8%, respectively, due to the adopted compensation, and therefore the circular motion accuracy is substantially improved. Finally, position errors of the two measurement points are analyzed to have little influence on the measurement result and the validity of the proposed compensation method is proved.
Pose Alignment of Aircraft Structures with Distance Sensors and CCD Cameras

Hua Liu,Weidong Zhu,Yinglin Ke

DOI: https://doi.org/10.1016/j.rcim.2017.02.003

IF: 10.103

2017-01-01

Robotics and Computer-Integrated Manufacturing

Abstract:A precise transshipment system is developed for automatic transporting material between an automated guided vehicle (AGV) and a load transfer station. In order to implement the alignment of the fixture base on board the AGV with that of the station, it's necessary to measure the pose of the AGV with respect to the station. The pose measurement system combined four distance sensors with two CCD cameras, with the distance sensors to measure the yaw, pitch angle and longitudinal deviation, and the cameras to determine the roll angle and the position deviation in the reference plane. A 6-degree of freedom (DOF) pose alignment system based on 3-DOF positioners is used to correct the pose deviation of the current pose with respect to the goal pose, lowering the demand on locating precision of AGV on the ground. The method to calibrate the whole measurement system is elaborately stated. The transshipment experiments have been conducted and the results show that the pose alignment system integrated with the proposed multi-sensor pose measurement system can meet the accuracy and repeatability required in industrial application.
Laser autocollimation based on an optical frequency comb for absolute angular position measurement

Yuan-Liu Chen,Yuki Shimizu,Jun Tamada,Kazuki Nakamura,Hiraku Matsukuma,Xiuguo Chen,Wei Gao

DOI: https://doi.org/10.1016/j.precisioneng.2018.06.005

IF: 3.315

2018-01-01

Precision Engineering

Abstract:Laser autocollimation is innovated for absolute angular position measurement based on an optical frequency comb. The conventional laser autocollimation can only make relative angle measurement due to the unknown angular distance between the incident laser beam and the axis of the autocollimation unit. In the proposed absolute laser autocollimation employed with the femtosecond laser autocollimator, in which a femtosecond laser and a diffraction grating are employed as the measurement light source and the reflector, respectively, a new method is proposed for accurate identification of the angular distance through taking use of first-order diffracted beams from the reflector associated with the optical frequency comb of the femtosecond laser source. With the identified angular distance, the absolute angular position of the grating reflector, which is defined by the angle between the normal axis of the reflector surface and the incident laser beam, can be determined from the information of optical frequencies of the first-order diffracted beams based on the fact that each of the first-order diffracted beams from the grating reflector has a deterministic angular position corresponding to the optical frequency of each comb mode of the femtosecond laser. Principle of the proposed absolute laser autocollimation and an experimental setup as well as experimental results demonstrating the effectiveness and potentiality of the proposed method are presented.
Automatic Drift Compensation Using Phase Correlation Method for Nanomanipulation

Qinmin Yang,S. Jagannathan,E. W. Boharman

DOI: https://doi.org/10.1109/tnano.2007.915021

2008-01-01

IEEE Transactions on Nanotechnology

Abstract:Nanomanipulation and nanofabrication with an atomic force microscope (AFM) or other scanning probe microscope (SPM) are a precursor for nanomanufacturing. It is still a challenging task to accomplish nanomanipulation automatically. In ambient conditions without stringent environmental controls, the task of nanomanipulation requires extensive human intervention to compensate for the spatial uncertainties of the SPM. Among these uncertainties, the thermal drift, which affects spatial resolution, is especially hard to solve because it tends to increase with time, and cannot be compensated simultaneously by feedback from the instrument. In this paper, a novel automatic compensation scheme is introduced to measure and estimate the drift one-step ahead. The scheme can be subsequently utilized to compensate for the thermal drift so that a real-time controller for nanomanipulation can be designed, as if the drift did not exist. Experimental results show that the proposed compensation scheme can predict drift with a small error, and therefore, can be embedded in the controller for manipulation tasks.
Small-angle measurement in laser autocollimation based on a common-path compensation method

Yan Guo,Haobo Cheng,Yongfu Wen,Hengyu Wu,Yumin Wu

DOI: https://doi.org/10.1080/09500340.2019.1677954

IF: 1.3

2019-10-13

Journal of Modern Optics

Abstract:In this study, a common-path compensation method is proposed for the laser beam drift resulting from the air parameters to enhance the stability of small-angle measurement in laser autocollimation. The measuring and reference beams generated with this method can propagate along approximately the same route such that the drifts in the two beams are nearly equal. Therefore, the angular drift of the measuring beam can be adequately compensated by that of the reference beam. The compensation principle was analyzed, and the experimental results revealed that, with three types of air parameter disturbances, the static measurement stability was better than 0.193 arcsec in 100 min after compensation, and the compensation rate was higher than 86.6%. Additionally, the dynamic measurement stability was 0.227 arcsec in 50 s after compensation, and the compensation rate was 53.6%. It is confirmed that the proposed method is effective for laser autocollimation.

optics
An optical method based auto-collimation for measuring five degrees of freedom error motions of rotary axis

Huining Zhao,Wenjing Ding,Mengyao Fan,Haojie Xia,Liandong Yu

DOI: https://doi.org/10.1063/5.0127199

2022-12-01

Abstract:The paper presents an optical method based on auto-collimation to simultaneously measure five degrees of freedom error motions of the rotary axis. The proposed method consists of the collimated lasers, beam splitters, focusing lens, quadrant photodiode detectors, a high-precision steel ball, and a special mirror fixed to the rotary axis. The mathematical model is established byoptical ray tracing, and the corresponding optical path is also simulated by OpticStudio. Meanwhile, an adjusting mechanism for X-Y micro-displacement, based on the elastic deformation of the material, is designed to adjust the installation eccentricity error of the high-precision steel ball. The calibration results of the proposed system demonstrate that the displacement errors are ±0.25 µm within the measuring range of ±10 µm, and the tilt angle errors are ±0.6 arcsec within the measuring range of ±25 arcsec. Taking a direct drive (DD) motor as the test object, the radial error motions of the rotary axis range from -3.2 to 4.1 µm, the axial error motions range from -4.9 to 4.7 µm, and the tilt error motions around the X and Y axes range from -2.8 to 1.8 arcsec and -2.6 to 2.0 arcsec, respectively.
Beam Drift Reduction by Straightness Measurement Based on a Digital Optical Phase Conjugation

Jiarui Li,Haoyun Wei,Yan Li

DOI: https://doi.org/10.1364/ao.58.007636

IF: 1.9

2019-01-01

Applied Optics

Abstract:One of the greatest challenges of long distance measurement is the beam drift caused by the air refractive index gradient. It has been established in many researches that optical phase conjugation (OPC) can be used to compensate for the beam bending. However, this method is limited to responding speed, phase conjugate reflectivity, flexibility, and specific source and medium. To reduce beam drift, instead of OPC, this study applies a digital OPC (DOPC) method, which is also creatively applied to collimation and flatness measurements. The main devices in the wavefront correction unit are the spatial light modulator and the Shack-Hartmann wavefront sensor. For the straightness measurement unit, the collimation and flatness of the optical rail are measured through the prism system and a position-sensing detector. After wavefront compensation, the root mean square is decreased from 0.0029λ to 0.0005λ. The beam drift is decreased from 1.22 mm to 0.70 mm in the x direction and from 2.49 mm to 1.55 mm in the y direction. The experimental data indicate that the straightness measurement system based on DOPC can effectively decrease the beam drift.
Effect of Dual-Channel Optical Feedback on Self-Mixing Interferometry System

Shaohui Zhang,Yao Hu,Jie Cao,Shulian Zhang,Qun Hao

DOI: https://doi.org/10.1088/2040-8986/aaf5be

IF: 2.1

2019-01-01

Journal of Optics

Abstract:Laser feedback interference is widely used for displacement measurement of non-cooperative targets due to its ultra-high sensitivity. However, by the same token, laser feedback interferometry (LFI) suffers from multi-channel optical feedback, which compromises measurement stability and accuracy. We perform both simulations and experiments to study the effect of dual-channel optical feedback on LFI systems based displacement measurement. Dual-channel optical feedback interference is the simplest and most representative form of multi-channel feedback interference. We evaluate system performance by varying alpha, which is the ratio of feedback level in the primary channel to the one in the secondary channel The results indicate that the measured displacement curve is a linear line superimposed with nonlinear periodic errors when the target in the primary channel moves linearly and the target in the secondary channel stays stationary. Whereas, the curve is a periodic curve instead of a linear one, for the case when the target in the secondary channel moves linearly while the one in the primary channel stays stationary. Furthermore, the amplitude and shape of the periodic curves also depend on the parameter alpha. When alpha is much less than 1, the displacement curve is sinusoidal, whereas the curve has a saw-tooth shape with larger amplitude for alpha close to 1. In view of this situation, a new displacement measurement method, counting the cycles of the periodic displacement curves, is proposed. The current work can provide theoretical and experimental suggestions for improving the performance of existing self-mixing interferometry systems, and implementing ones with multi-channel optical feedback channels.
High-precision Small-angle Measurement of Laser-fiber Autocollimation Using Common-path Polarized-light Difference

Fajia Zheng,Fei Long,Yuqiong Zhao,Chunyu Yu,Peizhi Jia,Bin Zhang,Ding Yuan,Qibo Feng

DOI: https://doi.org/10.1109/jsen.2023.3258924

IF: 4.3

2023-01-01

IEEE Sensors Journal

Abstract:The laser autocollimation measurement method is an important technique for the precise measurement of small angles. However, the beam drift significantly affects the accuracy and stability of laser autocollimation. This article is the first to present a laser-fiber autocollimation method for measuring small angles with the difference in common-path polarized light. In principle, this method greatly reduces the laser beam drift caused by various factors and significantly improves the measurement accuracy and stability. The effects of the factors affecting beam drift on small-angle measurement were analyzed and simulated. A corresponding measurement system was developed with the capability to measure not only small angular changes in a single object but also relatively small angular changes between two objects, and a series of experiments were conducted. The results indicated that the angle measurement stability was improved by 90%–98% using the difference in common-path polarized light to compensate the beam drift caused by mechanical structure drift, vibration, and environmental disturbance. Extremely high measurement stability of 0.07 in 10 h and $0.04''$ in 2 h was obtained at 500 mm. Furthermore, the measurement system was effectively used to measure the thermal stability of a star sensor bracket of a satellite, yielding a thermal stability of $0.15''/^{circ } ext{C}$ to meet the on-orbit operational stability requirement of $0.25''/^{circ } ext{C}$ . Thus, this new method compensates for beam drift in the autocollimation measurement of small-angle changes in a single object and relatively small angular changes between two objects.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Self‐calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry

Ralf D. Geckeler,Andreas Just,Michael Krause,Olaf Schnabel,Ian Lacey,Damon English,Valeriy V. Yashchuk

DOI: https://doi.org/10.1107/s1600577524003552

IF: 2.557

2024-06-06

Journal of Synchrotron Radiation

Abstract:The beam shaping optics of synchrotrons and X‐ray free‐electron lasers are routinely measured using deflectometric profilometers, which use autocollimators to evaluate the surface slope from the displacement of a reticle image on a detector. Here, novel strategies to reduce systematic measurement errors by using a set of overlapping images of the reticle obtained at different positions on the detector, which can reduce the systematic errors by up to a factor of four to five without recourse to external measurements, are discussed.Deflectometric profilometers are used to precisely measure the form of beam shaping optics of synchrotrons and X‐ray free‐electron lasers. They often utilize autocollimators which measure slope by evaluating the displacement of a reticle image on a detector. Based on our privileged access to the raw image data of an autocollimator, novel strategies to reduce the systematic measurement errors by using a set of overlapping images of the reticle obtained at different positions on the detector are discussed. It is demonstrated that imaging properties such as, for example, geometrical distortions and vignetting, can be extracted from this redundant set of images without recourse to external calibration facilities. This approach is based on the fact that the properties of the reticle itself do not change – all changes in the reticle image are due to the imaging process. Firstly, by combining interpolation and correlation, it is possible to determine the shift of a reticle image relative to a reference image with minimal error propagation. Secondly, the intensity of the reticle image is analysed as a function of its position on the CCD and a vignetting correction is calculated. Thirdly, the size of the reticle image is analysed as a function of its position and an imaging distortion correction is derived. It is demonstrated that, for different measurement ranges and aperture diameters of the autocollimator, reductions in the systematic errors of up to a factor of four to five can be achieved without recourse to external measurements.

optics,physics, applied,instruments & instrumentation
An Automatic Beam Alignment System Based On Relative Reference Points For Thomson Scattering Diagnosis System

Wei-Qiang Tan,Peng Yuan,Peng Wang,Wen-Zhe Mao,Jin-Lin Xie,Tao Lan,Wei-Xing Ding,Hong Li,Ge Zhuang,Wan-Dong Liu,Jian Zheng

DOI: https://doi.org/10.1063/1.5123301

IF: 1.6

2019-01-01

Review of Scientific Instruments

Abstract:An automatic beam alignment system based on relative reference points is developed for the Thomson scattering system on Keda Torus eXperiment. Two critical apertures around the vacuum vessel are designed to shield stray light, and a probe beam is required to go through the centers of these two apertures, which are the reference points for alignment. Since these two apertures are coated with light absorbing materials, three fibers with glowing tips are employed to indicate the centers of two apertures. CMOS cameras are used to monitor beam deviations. The misalignment correction is achieved by driving piezomotor mirror mounts via a program developed with LabVIEW, which includes the image acquisition and processing module and the deviation correction module. As a result, this system can correct beam misalignment in less than 20 s and suppress the long-term drift of laser pointing in +/- 10 mu rad. Also, this system has the capability to correct up to about 2.3 mm of camera shift with our experiment condition. Published under license by AIP Publishing.

Drift compensation system of an autocollimator based on reciprocal roll angles and a feedback combination target

Laser Collimation Method Based on Differential Compensating Beam Drift

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

Small Angular Displacement Measurement Based on an Autocollimator and a Common-Path Compensation Principle.

Four Degree-Of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift

Roll angle measurement based on common path compensation principle

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

Measuring Straightness Method with Common Path Compensation for Laser Drift

A Systemic Model for Simultaneously Measuring Three dimensional Rotation Angles of the Linear Guide Track [J]

A Software-Compensation Method to Orthogonal Magnetic Field Drift in A Depolarized Fiber-Optic Gyroscope

Error Modeling and Compensation of Circular Motion on a New Circumferential Drilling System

Pose Alignment of Aircraft Structures with Distance Sensors and CCD Cameras

Laser autocollimation based on an optical frequency comb for absolute angular position measurement

Automatic Drift Compensation Using Phase Correlation Method for Nanomanipulation

Small-angle measurement in laser autocollimation based on a common-path compensation method

An optical method based auto-collimation for measuring five degrees of freedom error motions of rotary axis

Beam Drift Reduction by Straightness Measurement Based on a Digital Optical Phase Conjugation

Effect of Dual-Channel Optical Feedback on Self-Mixing Interferometry System

High-precision Small-angle Measurement of Laser-fiber Autocollimation Using Common-path Polarized-light Difference

Self‐calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry

An Automatic Beam Alignment System Based On Relative Reference Points For Thomson Scattering Diagnosis System