Megasonic Enhanced Electrodeposition

Jens Georg Kaufmann,Marc Desmulliez,D. Price
DOI: https://doi.org/10.48550/arXiv.0805.0860
2008-05-07
Abstract:A novel way of filling high aspect ratio vertical interconnection (microvias) with an aspect ratio of >2:1 is presented. High frequency acoustic streaming at megasonic frequencies enables the decrease of the Nernst-diffusion layer down to the sub-micron range, allowing thereby conformal electrodeposition in deep grooves. Higher throughput and better control over the deposition properties are possible for the manufacturing of interconnections and metal-based MEMS.
Other Computer Science
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