Abstract:Tensile-strained materials have been used to fabricate nano- and micromechanical resonators with ultra-low mechanical dissipation in the kHz to MHz frequency range. These mechanical resonators are of particular interest for force sensing applications and quantum optomechanics at room temperature. Tensile-strained crystalline materials that are compatible with epitaxial growth of heterostructures would thereby allow realizing monolithic free-space optomechanical devices, which benefit from stability, ultra-small mode volumes, and scalability. In our work, we demonstrate string- and trampoline resonators made from tensile-strained InGaP, which is a crystalline material that can be epitaxially grown on an AlGaAs heterostructure. The strain of the InGaP layer is defined via its Ga content when grown on (Al,Ga)As. In our case, we realize devices with a stress of up to 470\,MPa along the $[1\,1\,0]$ crystal direction. We characterize the mechanical properties of the suspended InGaP devices, such as anisotropic stress, yield strength, and intrinsic quality factor. We find that the latter degrades over time. We reach mechanical quality factors surpassing $10^7$ at room temperature with a $Q\cdot f$-product as high as $7\cdot10^{11}\,$Hz with trampoline-shaped micromechanical resonators, which exploit strain engineering to dilute mechanical dissipation. The large area of the suspended trampoline resonator allows us to pattern a photonic crystal to engineer its out-of-plane reflectivity in the telecom band, which is desired for efficient signal transduction of mechanical motion to light. Stabilization of the intrinsic quality factor together with a further reduction of mechanical dissipation through hierarchical clamping or machine learning-based optimization methods paves the way for integrated free-space quantum optomechanics at room temperature in a crystalline material platform.

Monocrystalline AlGaAs heterostructures for high-reflectivity high-Q micromechanical resonators in the MHz regime

High reflectivity high-Q micromechanical Bragg mirror

Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Ultrahigh-Q AlGaAs-on-insulator Microresonators for Integrated Nonlinear Photonics.

High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling

18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector

Silicon microcavity arrays with open access and a finesse of half a million

High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics

Ultrahigh Q-Frequency product for optomechanical disk resonators with a mechanical shield

Phononically shielded photonic-crystal mirror membranes for cavity quantum optomechanics

Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature

High-Q Resonators on Single Crystal Aluminum Nitride Grown by Molecular Beam Epitaxy

High <i>Q</i> Microresonators Based on Epitaxial GaN Film

Integrated High-Q Crystalline AlN Microresonators for Broadband Kerr and Raman Frequency Combs

Thickness dependence of the mechanical properties of piezoelectric high-$Q_m$ nanomechanical resonators made from aluminium nitride

17 000%/W Second-Harmonic Conversion Efficiency in Single-Crystalline Aluminum Nitride Microresonators

17,000 %/W Second Harmonic Conversion Efficiency in Single Crystalline Aluminum Nitride Microresonators

A frequency-tunable nanomembrane mechanical oscillator with embedded quantum dots

Integrated microcavity optomechanics with a suspended photonic crystal mirror above a distributed Bragg reflector