17 000%/W Second-Harmonic Conversion Efficiency in Single-Crystalline Aluminum Nitride Microresonators

Alexander W. Bruch,Xianwen Liu,Xiang Guo,Joshua B. Surya,Zheng Gong,Liang Zhang,Junxi Wang,Jianchang Yan,Hong X. Tang

DOI: https://doi.org/10.1063/1.5042506

IF: 4

2018-01-01

Applied Physics Letters

Abstract:High quality factor optical microcavities have been employed in a variety of material systems to enhance nonlinear optical interactions. While single-crystalline aluminum nitride microresonators have recently emerged as a low loss platform for integrated nonlinear optics such as four wave mixing and Raman lasing, few studies have investigated this material for second-harmonic generation. In this letter, we demonstrate an optimized fabrication of dually resonant phase-matched ring resonators from epitaxial aluminum nitride thin films. An unprecendented second-harmonic generation efficiency of 17 000%/W is obtained in the low power regime, and pump depletion is observed at a relatively low input power of 3.5 mW. This poses epitaxial aluminum nitride as the highest efficiency second-harmonic generator among current integrated platforms.