Abstract:Core-shell composite abrasive particles are a topic of great interest in surface finishing. It is important to explore the preparation technology and performance parameters associated with them. In this paper, a core-shell composite abrasive particle made of polystyrene and cerium oxide (PS&CeO2, CSPC), which is rigid on the outside and flexible on the inside, is proposed. The microstructure, physical phase characteristics, and mechanical properties of the inner core and composite abrasive particles are investigated. PS microspheres and CSPC composite abrasive particles with different structural features were prepared through a series of experiments, morphological observations, and physical and chemical characterization experiments. Their microstructures and physical phase properties were investigated. The indentation load curves of the PS microspheres and CSPC composite abrasive samples were measured by using an atomic force microscope. The analysis focused on the effects of various dimensional and structural parameters on the modulus of elasticity of both PS microspheres and CSPC composite abrasive particles. The analysis shows that the experimentally prepared PS microspheres have good dispersion, a smooth surface, and a uniform particle size distribution. The prepared CSPC composite abrasive particles are regular spheres with rough, rice-like surfaces, low modulus of elasticity, and overall nonrigid and soft elastic properties. The results of this paper can provide a guide for the preparation technology, performance regulation, and application of polymer microspheres and core-shell composite abrasive particles in CMP.

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