Local gating of carbon nanotubes

M. J. Biercuk,N. Mason,C. M. Marcus
DOI: https://doi.org/10.1021/nl034696g
2003-08-25
Abstract:Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo "finger gates" (150 x 10nm). Prior to tube growth, several finger gates were patterned lithogrpahically and subsequently coated with a patterned high-k dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have a distinct effect from a global backgate.
Mesoscale and Nanoscale Physics,Materials Science
What problem does this paper attempt to address?
The problem that this paper attempts to solve is: how to achieve independent control of the conductive properties of single - walled carbon nanotubes (SWNTs) through local electrodes, so as to overcome the limitations of the previous global gate effect. Specifically, the author aims to show whether multiple electrostatic finger gates can independently regulate the electron transport properties in carbon nanotubes at the nanoscale. ### Research Background and Problem Description 1. **Limitations of Existing Technologies** - At present, most research focuses on using the global backgate to regulate the electrical properties of carbon nanotube devices. - Previous studies have shown that gate regulation of carbon nanotubes can be achieved by various methods, such as using Al backgates, high - dielectric - constant materials, metal side gates, liquid - phase electrolyte solutions, and external scanning gates. However, these methods usually can only achieve global coupling effects and cannot achieve local independent regulation. 2. **Research Objectives** - The objective of this study is to grow single - walled carbon nanotubes by chemical vapor deposition (CVD) and combine micro - and nano - fabrication techniques (such as electron - beam lithography and low - temperature atomic layer deposition) to fabricate devices with multiple local finger gates, thereby achieving local independent control of the conductive properties of carbon nanotubes. - Specifically, the author hopes to experimentally verify whether these local gates can independently modulate different regions of carbon nanotubes, rather than producing a global effect like the traditional backgate. ### Experimental Design and Results - **Device Structure** - On a Si/SiO₂ substrate, multiple Mo finger gates with a width of about 150 nm were defined by electron - beam lithography, and a 25 - nm - thick HfO₂ high - dielectric - constant material was deposited on them. - Single - walled carbon nanotubes were grown from Fe catalyst islands across these finger gates by the CVD method and contacted by Ti/Au electrodes. - **Experimental Results** - By measuring the conductance change under different gate voltages, it was found that the local finger gates can indeed independently modulate the conductive properties of carbon nanotubes. - When a certain finger gate is adjusted alone, its influence on conductance is different from that of other gates, showing the effect of local modulation. - Compared with the global backgate, the local gate has a more refined effect and can modulate the transparency of scattering centers in a specific area without causing global changes in the entire nanotube. ### Conclusion This study successfully demonstrates the independent control of the conductive properties of single - walled carbon nanotubes through local finger gates, providing new ideas and technical means for the future development of more complex nano - electronic devices (such as multi - gate field - effect transistors or multi - quantum - dot structures). ### Mathematical Formula Representation The conductance formula involved in the paper is: \[ G=\frac{I}{V} \] where \( I \) is the current and \( V \) is the voltage. In addition, the conductance unit is represented by \( e^{2}/h \), where \( e \) is the electron charge and \( h \) is Planck's constant. It is hoped that this information will help you better understand the research content and significance of this paper. If you have any further questions or need more detailed explanations, please feel free to let me know!