Local gating of carbon nanotubes

M. J. Biercuk,N. Mason,C. M. Marcus
DOI: https://doi.org/10.1021/nl034696g
2003-08-25
Abstract:Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo "finger gates" (150 x 10nm). Prior to tube growth, several finger gates were patterned lithogrpahically and subsequently coated with a patterned high-k dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have a distinct effect from a global backgate.
Mesoscale and Nanoscale Physics,Materials Science
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