Vibration disturbance compensation in in situ confocal microscopy

Jian Liu,Zhenlong Xu,Ziyi Wang,Chenguang Liu

DOI: https://doi.org/10.1364/ol.539064

IF: 3.6

2024-09-27

Optics Letters

Abstract:Jian Liu, Zhenlong Xu, Ziyi Wang, Chenguang Liu In situ microscopic measurement, conducted within the natural environment of a material or device, offers precise observations directly at ... [Opt. Lett. 49, 5567-5570 (2024)]

optics

What problem does this paper attempt to address?

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Haydn Martin,Kaiwei Wang,Xiangqian Jiang

DOI: https://doi.org/10.1364/ao.47.000888

IF: 1.9

2008-01-01

Applied Optics

Abstract:Light beam scanning using a dispersive element and wavelength tuning is coupled with fiber-optic interferometry to realize a new surface measurement instrument. The instrument is capable of measuring nanoscale surface structures and form deviations. It features active vibration compensation and a small optical probe size that may be placed remotely from the main apparatus. Active vibration compensation is provided by the multiplexing of two interferometers with near common paths. Closed loop control of a mirror mounted on a piezoelectric transducer is used to keep the path length stable. Experiments were carried out to deduce the effectiveness of the vibration compensation and the ability to carry out a real measurement in the face of large environmental disturbance.
Micro-vibration measuring technology based on heterodyne interference

Dan Liu,Bin Zheng,Hualing Guo,Hui Liu,Naiqiang Liu

DOI: https://doi.org/10.5768/JAO201435.0503006

2014-01-01

Journal of Applied Optics

Abstract:Aiming at the problem that the micro-vibration based on heterodyne interference has low stability and is easily impacted by environmental noise ,the ideas of optical path improve-ment were given .According to the difference principle ,the single optical path was converted to a double optical path ,in which the environmental noise was eliminated ;The elliptically po-larized light was changed into linearly polarized light to improve the interference signal ampli-tude by the polarization splitting prism (PBS);The acousto-optic modulator(AOM ) was im-proved to inhibit frequency drift ;The stray light was suppressed by using diaphragm filters so as to improve the system signal-noise ratio (SNR) .The verification experiments were conduc-ted through detecting 5 kHz piezoelectric vibration signal and 2 .5 M Hz laser ultrasonic signal . Experimental results indicate that signal is stable and has no ripple ,the resolution is 2 .3 nm and the SNR has improved by 16 .7 times .The amplitudes of double-channel heterodyne inter-ferometer signal is 552 mV and 736 mV ,respectively ,which are larger than traditional one nearly 10 times ,it is advantageous to measure nanometer micro-vibration signals .
Optical vibration sensor enabled by coupling mechanoluminescence with photostimulable phosphor

Jiaxing Guo,Haisheng Chen,Minghao Hu,Yang Zhang

DOI: https://doi.org/10.1364/ol.544360

IF: 3.6

2024-12-11

Optics Letters

Abstract:Jiaxing Guo, Haisheng Chen, Minghao Hu, Yang Zhang In the working environment, machines without vibrations are non-existent. The abnormal operating conditions of machines can be discerned ... [Opt. Lett. 49, 7114-7117 (2024)]

optics
Structural vibration control using spatially configured opto-electromechanical actuators

Hui-Ru Shih,Horn-Sen Tzou,Manov Saypuri

DOI: https://doi.org/10.1016/j.jsv.2004.06.013

IF: 4.7

2005-01-01

Journal of Sound and Vibration

Abstract:Traditional smart-material actuator systems are hard-wired, so that they are likely sensitive to electromagnetic interference in many operating conditions and environments. A photostrictive type of opto-electromechanical actuator activated by high-energy lights can introduce actuation and control effects without hard-wired connections. In this paper, the behavior of photostrictive opto-electromechanical actuators bonded to the surface of two-dimensional (2D) elastic structures for active vibration control is investigated. General opto-piezo-thermo-elastic equations for predicting opto-piezo-thermo-elastic behavior of photostrictive opto-electromechanical actuators are presented. All material constants of photostrictive actuators are calibrated based on laboratory experiments. Analytical solutions and numerical results demonstrate that the spatially configured discrete opto-electromechanical actuators at carefully selected locations can effectively suppress the dominating fundamental vibration modes of 2D structures.
Optical Fourier Transform Based In-Plane Vibration Characterization for MEMS Comb Structure

Yong-Feng Gao,Liangcai Cao,Zheng You,Jiahao Zhao,Zichen Zhang,Jianzhong Yang

DOI: https://doi.org/10.1364/oe.21.005063

IF: 3.8

2013-01-01

Optics Express

Abstract:On-line and on-wafer characterizations of mechanical properties of Micro-Electro-Mechanical-System (MEMS) with efficiency are very important to the mass production of MEMS foundry in the near future. However, challenges still remain. In this paper, we present an in-plane vibration characterizing method for MEMS comb using optical Fourier transform (OFT). In the experiment, the intensity distribution at the focal plane was captured to characterize the displacement of the vibrator in the MEMS comb structure. A typical MEMS comb was tested to verify the principle. The shape and the movement of MEMS comb was imitated and tested to calibrate the measurement by using a spatial light modulator (SLM). The relative standard deviations (RSD) of the measured displacements were better than 5%, where the RSD is defined as the ratio of the standard deviation to the mean. It is convinced that the presented method is feasible for on-line and on-wafer characterizations for MEMS with great convenience, high efficiency and low cost.
Acoustic-Excitation Optical Coherence Vibrometer for Real-Time Microstructure Vibration Measurement and Modal Analysis

Ning Zhou,Shuncong Zhong,Jiewen Lin,Manting Luo,Walter Nsengiyumva,Zhike Peng,Yingjie Yu

DOI: https://doi.org/10.1109/tim.2020.2975453

IF: 5.6

2020-09-01

IEEE Transactions on Instrumentation and Measurement

Abstract:An acoustic-excitation optical coherence vibrometer (AE-OCV) is proposed for noncontact microstructure vibration measurement and modal analysis. The vibration dynamic parameters of the microstructure can be captured with a subnanometer displacement resolution by the proposed AE-OCV using spectral wavelength calibration algorithm and spectral center correction method. The natural frequency of the microstructure could also be obtained by the developed noncontact AE-OCV system using the swept-frequency acoustic excitation method. Furthermore, a home-made spectrometer based on a high-speed linear camera could provide the system with a frequency measurement range of 0–50 kHz. The developed AE-OCV has an excellent performance in microstructures vibration measurement and modal analysis, especially for high-frequency and nanoscale vibration measurements. It is of great significance to the design of the microelectromechanical system (MEMS), such as the noncontact dynamic measurement of cantilevered beams in atomic force microscopy.

engineering, electrical & electronic,instruments & instrumentation
Photodeformation Based Optomechanical Shell Actuators Applied to Vibration Control of Continua: A Sensitivity Study

B. J. Liu,D. Kidd,H. S. Tzou

DOI: https://doi.org/10.1115/imece1998-0398

1998-01-01

Abstract:Abstract Photodeformation involves two fundamental opto-electromechanical coupling phenomena: 1) the photovoltaic effect and 2) the converse piezoelectric effect. Irradiating high-energy lights, such as lasers or ultraviolet lights, on certain classes of photostrictive materials can trigger the photodeformation process and the induced strains can be used for non-contact precision actuation and control. This paper is to evaluate the sensitivity and the distributed control effectiveness of distributed optomechanical shell actuators. Various design parameters, e.g., in-plane and out-of-plane control actions, actuator sizes and locations, are evaluated and their sensitivities are reported.
A Vibration Compensation Method Based on White-light Wavelength Scanning Interferometry

Mao Jian,Xu Peng,Yang Jiangxin,Cao Yanlong

DOI: https://doi.org/10.3969/j.issn.1004-132X.2015.10.005

2015-01-01

Abstract:A surface topography measurement system with vibration compensation was developed herein based on the white-light wavelength scanning interferometry .Both of phase extraction algo-rithm and phase unwrapping algorithm was analyzed for the white-light wavelength scanning interfer-ometry .They could be used to modify the nonlinear errors during the acousto-optic tunable filter (AOTF) swept at low rate .The hardware control module was designed for the vibration compensa-tion .In order to verify the designed system ,both of 3-dimensional(3D) surface topography and the roughness parameter of the standard sample grinding at level 12 were evaluated under different vibra-tion environments .The results demonstrate that the measurement results with low frequency vibra-tion are about two times than those of without vibration .After opening the system vibration feedback , the results approache to the maximum allowed value .It shows that the proposed method can eliminate the vibration effect in a certain extent .Compared with two dimensional(2D) surface evaluation re-sults ,3D surface evaluation can express the measured topography surface comprehensively .
Note: an in Situ Method for Measuring the Non-Linear Response of a Fabry-Perot Cavity.

Wenhao Bu,Mengke Liu,Dizhou Xie,Bo Yan

DOI: https://doi.org/10.1063/1.4963361

IF: 1.6

2016-01-01

Review of Scientific Instruments

Abstract:The transfer cavity is a very important frequency reference for laser stabilization and is widely used for applications such as precision measurements and laser cooling of ions or molecules. But the non-linear response of the piezoelectric ceramic transducer (PZT) in the Fabry-Perot cavity limits the performance of the laser stabilization. Thus, measuring and controlling such non-linearity is essential. Here we report an in situ, optical method to characterize this non-linearity by measuring the resonant signals of a dual-frequency laser. The differential measurement makes it insensitive to the laser and cavity drifts, while maintaining a very high sensitivity. It can be applied for various applications with PZTs, especially in an optical lab.
An Optic-Fiber Interferometer for the Dynamic Characterization of Microstructures.

Chong Peng,Peiqiang Zhang

DOI: https://doi.org/10.1142/s0219878904000185

2004-01-01

Abstract:This article describes a measurement system designed to evaluate the dynamic characteristics of micromechanical structures. The system is based on Active Homodyne demodulation M-Z optic-fiber interferometer and can measure out-of-plane movement with a sensitivity of 0.1 nm. To validate the system, vibration measurements have been carried on a typical MEMS structure — the sensitive elements of a kind of uncooled IR imaging system, an array of micromachined bimaterial cantilevers (micron dimensions) — and the results are compared with the ones from FEM model analysis and another measurement method which can be known as spectrum plane optic filtering. The three results agree with each other. The first natural frequencies of the structures are determined from data obtained by vibrating the structures using a PZT excitation system. The mode shapes and modal damping will be carried out soon after a scanning system is completed.
A Coatable, Light-Weight, Fast-Response Nanocomposite Sensor for Thein Situacquisition of Dynamic Elastic Disturbance: from Structural Vibration to Ultrasonic Waves

Zhihui Zeng,Menglong Liu,Hao Xu,Weijian Liu,Yaozhong Liao,Hao Jin,Limin Zhou,Zhong Zhang,Zhongqing Su

DOI: https://doi.org/10.1088/0964-1726/25/6/065005

IF: 4.1

2016-01-01

Smart Materials and Structures

Abstract:Inspired by an innovative sensing philosophy, a light-weight nanocomposite sensor made of a hybrid of carbon black (CB)/polyvinylidene fluoride (PVDF) has been developed. The nanoscalar architecture and percolation characteristics of the hybrid were optimized in order to fulfil the in situ acquisition of dynamic elastic disturbance from low-frequency vibration to high-frequency ultrasonic waves. Dynamic particulate motion induced by elastic disturbance modulates the infrastructure of the CB conductive network in the sensor, with the introduction of the tunneling effect, leading to dynamic alteration in the piezoresistivity measured by the sensor. Electrical analysis, morphological characterization, and static/dynamic electromechanical response interrogation were implemented to advance our insight into the sensing mechanism of the sensor, and meanwhile facilitate understanding of the optimal percolation threshold. At the optimal threshold (∼6.5 wt%), the sensor exhibits high fidelity, a fast response, and high sensitivity to ultrafast elastic disturbance (in an ultrasonic regime up to 400 kHz), yet with an ultralow magnitude (on the order of micrometers). The performance of the sensor was evaluated against a conventional strain gauge and piezoelectric transducer, showing excellent coincidence, yet a much greater gauge factor and frequency-independent piezoresistive behavior. Coatable on a structure and deployable in a large quantity to form a dense sensor network, this nanocomposite sensor has blazed a trail for implementing in situ sensing for vibration- or ultrasonic-wave-based structural health monitoring, by striking a compromise between ‘sensing cost’ and ‘sensing effectiveness’.
A New Optical Sensing Device for Real-Time Noncontact Vibration Measurement Considering Light Field Variation

Yuansheng Cheng,Zhixiong Li,Grzegorz M. Krolczyk,Chunsheng Yang,Ruqiang Yan

DOI: https://doi.org/10.1109/JSEN.2023.3272643

IF: 4.3

2023-01-01

IEEE Sensors Journal

Abstract:Vibration measurement is essential for vibration monitoring and control. Noncontact vibration measurement is more applicable in practice than the contact measuring manner, but the noncontact methods usually pose a high requirement in the light field environment. To solve this issue, a new binocular vision method is proposed to enable noncontact vibration measurement with different light fields. In this new method, the multitarget objects in the same image are first recognized by a YOLOv5 model to generate the bounding boxes; meanwhile, a depth image is generated through binocular vision and kept synchronized with the target image. Then, based on each bounding box and its corresponding depth image, an optimal depth value decision algorithm is developed to determine the 3-D real-time coordinates of each object. As a result, the vibration of multitarget objects can be measured simultaneously. An experimental test system was built to evaluate the performance of the proposed method in indoor and outdoor light fields. The tests demonstrate accurate vibration measuring results, and the proposed noncontact method is able to detect very low-frequency vibrations.
Vibration Measurement of Smart Composite Structures by Using the New Intensity Modulated Optical Fiber Sensor

JS Leng,AK Asundi,SY Du,DF Wang

DOI: https://doi.org/10.1117/12.339081

1999-01-01

Abstract:A new intensity modulated optical fiber vibration sensor has been employed to monitor the vibration signal in the smart composite structures in this paper. The advantages of this sensor are the lower cost and the easy-to-use system. The sensors were fabricated using conventional 50/125 step-index multimode optical fibers and the custom-drawn epoxy resin capillary tube. The construction of this sensor is like the extrinsic Fabry-Perot interferometric(EFPI). A face coupling theory of the intensity modulated fiber optic vibration sensor is developed. This optical fiber sensor has been embedded in the end of the smart composite cantilevered beam. The static and dynamic characteristics of this optical fiber vibration sensor have been tested. At same time, the compared test of this sensor with the commercial piezoelectric transducer are also finished. The experimental results show that the new type intensity modulated optical fiber vibration sensor has higher sensitivity and better dynamic and static properties. The spectrum response of this sensor are also agreeable to that of the commercial transducer.
Compensation for the Dynamics Effect on Nanoscale Broadband Viscoelasticity Measurements Using Adaptive Filtering Approach

Ping Xie,Zhonghua Xu,Qingze Zou,Hongbing Xu

DOI: https://doi.org/10.1109/tim.2010.2083270

IF: 5.6

2011-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:A large measurement frequency range (i.e., broadband) is desirable in mechanical property measurements; the measurement frequency range, however, is generally limited by the instrument dynamics effect. Such a limit arises due to the convolution of the instrument dynamics with the mechanical response of the material, particularly when the excitation force applied consists of multiple frequencies in the high-frequency range. The contribution of this paper is the utilization of the adaptive filtering approach to compensate for the instrument dynamics effect on nanoscale broadband viscoelasticity measurements using atomic force microscope (AFM). Specifically, the effect of the AFM dynamics convoluted into the measurement data is converted to an additive disturbance through a homomorphic transform, and the measured AFM dynamics response is utilized to generate the reference signal to the adaptive filter. The convergence of the adaptive filter is discussed, and the bound of the adaptive filter coefficient is quantified. The efficacy of the proposed approach is illustrated by implementing it to compensate for the dynamics effect on the broadband viscoelasticity measurement of a polydimethylsiloxane sample using AFM.
Accurate Aberration Correction In Confocal Microscopy Based On Modal Sensorless Method

Jian Liu,Weisong Zhao,Chenguang Liu,Chenqi Kong,Yixuan Zhao,Xiangyan Ding,Jiubin Tan

DOI: https://doi.org/10.1063/1.5088102

IF: 1.6

2019-01-01

Review of Scientific Instruments

Abstract:Confocal microscopy has the advantages of high resolution and optical sectioning ability over conventional microscopy. However, aberration induced by the optical system can compromise these advantages and considerably reduce the energy reaching the pointlike detector. We propose an accurate aberration correction method with a liquid-crystal spatial light modulator (LCSLM) in the confocal system. Each coefficient of Zernike aberration modes is calculated by directly measuring the variance of the images with different bias aberration modes. Large-coefficient (> 0.7 rad) aberration is compensated first by LCSLM, following which aberrations with small coefficients are measured precisely, minimizing the cross talk between different kinds of aberrations. With this predistortion strategy, the aberration correction is much more accurate, and maximum image intensity in the normal and nonconjugated systems is improved by 2.5 times and 4 times compared to the normal correction method, respectively, demonstrating the effectiveness of our method. Published under license by AIP Publishing.
MEMS Device for Quantitative in Situ Mechanical Testing in Electron Microscope

Xiaodong Wang,Shengcheng Mao,Jianfei Zhang,Zhipeng Li,Qingsong Deng,Jin Ning,Xudong Yang,Li Wang,Yuan Ji,Xiaochen Li,Yinong Liu,Ze Zhang,Xiaodong Han

DOI: https://doi.org/10.3390/mi8020031

IF: 3.4

2017-01-01

Micromachines

Abstract:In this work, we designed a micro-electromechanical systems (MEMS) device that allows simultaneous direct measurement of mechanical properties during deformation under external stress and characterization of the evolution of nanomaterial microstructure within a transmission electron microscope. This MEMS device makes it easy to establish the correlation between microstructure and mechanical properties of nanomaterials. The device uses piezoresistive sensors to measure the force and displacement of nanomaterials qualitatively, e.g., in wire and thin plate forms. The device has a theoretical displacement resolution of 0.19 nm and a force resolution of 2.1 μN. The device has a theoretical displacement range limit of 5.47 μm and a load range limit of 55.0 mN.
Vibration measurement of a miniature component by high-speed image-plane digital holographic microscopy.

Yu Fu,Hongjian Shi,Hong Miao

DOI: https://doi.org/10.1364/AO.48.001990

IF: 1.9

2009-01-01

Applied Optics

Abstract:Measuring deformation of vibrating specimens whose dimensions are in the submillimeter range introduces a number of difficulties using laser interferometry. Normal interferometry is not suitable because of a phase ambiguity problem. In addition, the noise effect is much more serious in the measurement of small objects because a high-magnification lens is used. We present a method for full-field measurement of displacement, velocity, and acceleration of a vibrating miniature object based on image-plane digital holographic microscopy. A miniature cantilever beam is excited by a piezoelectric transducer stage with a sinusoidal configuration. A sequence of digital holograms is captured using a high-speed digital holographic microscope. Windowed Fourier analysis is applied in the spatial and spatiotemporal domains to extract the displacement, velocity and acceleration. The result shows that a combination of image-plane digital holographic microscopy and windowed Fourier analyses can be used to study vibration without encountering a phase ambiguity problem, and one can obtain instantaneous kinematic parameters on each point. (C) 2009 Optical Society of America
Dynamic Behavior of Tuning Fork Shear-Force Structures in a SNOM System

Fengli Gao,Xide Li,Jia Wang,Yu Fu

DOI: https://doi.org/10.1016/j.ultramic.2014.03.011

IF: 2.994

2014-01-01

Ultramicroscopy

Abstract:Piezoelectric tuning fork shear-force structures are widely used as a distance control unit in a scanning near-field optical microscopy. However, the complex dynamic behavior among the micro-tuning forks (TFs), optical fiber probes, and the probe–surface interactions is still a crucial issue to achieve high-resolution imaging or near-field interaction inspections. Based on nonlinear beam tension-bending vibration theory, vibration equations in both longitudinal and lateral directions have been established when the TF structure and the optical fiber are treated as deformable structures. The relationship of the probe–surface interaction induced by Van der Waals force has been analyzed and the corresponding numerical results used to describe the vibrational behavior of the probe approaching the sample surface are obtained. Meanwhile, the viscous resistance of the liquid film on the sample surface has also been investigated using linear beam-bending vibration theory. Experiments testing the interaction between the probe and the water film on a single crystal silicon wafer have been carried out and the viscous resistance of the water film was estimated using the established equations. Finally, to use the TF-probe structure as a force sensor, the relation between the dynamic response of the TF-probe system and an external force on the probe tip was obtained.
Remote vectorial vibration sensing based on locally stabilized Mach–Zehnder interferometers using multi-core fiber and optical phase-locking

Yuanshuo Bai,Weilin Xie,Songhan Liu,Yinxia Meng,Ling Zhang,Wei Wei,Yi Dong

DOI: https://doi.org/10.1364/ol.489376

IF: 3.6

2023-04-26

Optics Letters

Abstract:Yuanshuo Bai, Weilin Xie, Songhan Liu, Yinxia Meng, Ling Zhang, Wei Wei, Yi Dong We report on remote sensing of vectorial vibration based on locally stabilized Mach–Zehnder interferometers (MZIs) using commercial ... [Opt. Lett. 48, 2369-2372 (2023)]

optics
Vibration Mitigation in J-TEXT Far-Infrared Diagnostic Systems.

Q. Li,J. Chen,G. Zhuang,Z. J. Wang,L. Gao,W. Chen

DOI: https://doi.org/10.1063/1.4732071

2012-01-01

Abstract:Optical structure stability is an important issue for far-infrared (FIR) phase measurements. To ensure good signal quality, influence of vibration should be minimized. Mechanical amelioration and optical optimization can be taken in turn to decrease vibration's influence and ensure acceptable measurement. J-TEXT (Joint Texal Experiment Tokamak, formerly TEXT-U) has two FIR diagnostic systems: a HCN interferometer system for electron density measurement and a three-wave polarimeter-interferometer system (POLARIS) for electron density and Faraday effect measurements. All use phase detection techniques. HCN interferometer system has almost eliminated the influence of vibration after mechanical amelioration and optical optimization. POLARIS also obtained first experimental results after mechanical stability improvements and is expected to further reduce vibration's influence on Faraday angle to 0.1° after optical optimization.

Vibration disturbance compensation in in situ confocal microscopy

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Micro-vibration measuring technology based on heterodyne interference

Optical vibration sensor enabled by coupling mechanoluminescence with photostimulable phosphor

Structural vibration control using spatially configured opto-electromechanical actuators

Optical Fourier Transform Based In-Plane Vibration Characterization for MEMS Comb Structure

Acoustic-Excitation Optical Coherence Vibrometer for Real-Time Microstructure Vibration Measurement and Modal Analysis

Photodeformation Based Optomechanical Shell Actuators Applied to Vibration Control of Continua: A Sensitivity Study

A Vibration Compensation Method Based on White-light Wavelength Scanning Interferometry

Note: an in Situ Method for Measuring the Non-Linear Response of a Fabry-Perot Cavity.

An Optic-Fiber Interferometer for the Dynamic Characterization of Microstructures.

A Coatable, Light-Weight, Fast-Response Nanocomposite Sensor for Thein Situacquisition of Dynamic Elastic Disturbance: from Structural Vibration to Ultrasonic Waves

A New Optical Sensing Device for Real-Time Noncontact Vibration Measurement Considering Light Field Variation

Vibration Measurement of Smart Composite Structures by Using the New Intensity Modulated Optical Fiber Sensor

Compensation for the Dynamics Effect on Nanoscale Broadband Viscoelasticity Measurements Using Adaptive Filtering Approach

Accurate Aberration Correction In Confocal Microscopy Based On Modal Sensorless Method

MEMS Device for Quantitative in Situ Mechanical Testing in Electron Microscope

Vibration measurement of a miniature component by high-speed image-plane digital holographic microscopy.

Dynamic Behavior of Tuning Fork Shear-Force Structures in a SNOM System

Remote vectorial vibration sensing based on locally stabilized Mach–Zehnder interferometers using multi-core fiber and optical phase-locking

Vibration Mitigation in J-TEXT Far-Infrared Diagnostic Systems.