A simple creation of freestanding three-dimensional microstructures by aligned mask micromolding for biomedical applications

Hui Li,Lei Wang,Jinyong Zhang,T. J. Flynn,Scott Stephens,C. Trinkle
DOI: https://doi.org/10.1109/NEMS.2017.8017102
2017-04-01
Abstract:There are established macroscale fabrication methods to create parts of virtually any shape or size; but for components in the microscale range (thousands to tens of microns) there is a dearth of options for making 3D parts at high enough throughput to make them practical. This paper demonstrated a novel method to create novel micromolding processes that are capable of creating defect-free microscale structures with controllable three-dimensional (3D) geometry, aligned two-sided patterns, a variety of material properties, integration of multiple materials into single structures, and high fabrication throughput. While some methods are available that are capable of meeting a few of these goals, nothing exists in the current microfabrication repertoire that can accomplish all simultaneously.
Materials Science
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