Spectroscopic Scatterfield Microscopy

B. Barnes,N. Heckert,R. Quintanilha,Hui Zhou,R. Silver
DOI: https://doi.org/10.1063/1.3251230
2009-10-14
Abstract:Scatterfield microscopy is a technique that combines the best attributes of scatterometry and high‐magnification imaging using a bright‐field microscope. In our work, we have traditionally moved an aperture in a conjugate back focal plane (CBFP) of the objective lens to control the angle of incidence. We have incorporated a new source into an existing microscope in order to scan the illumination wavelength, which has necessitated a new set of tool characterization requirements. We present experimental data and preliminary quantitative modeling results for metrology of sub‐wavelength features using this new method of illumination engineering.
Materials Science
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