Abstract:Self‐organization driven by femtosecond‐laser texturing of crystalline Si in oxidation‐preventing methanol allows to create diverse anti‐reflective surface morphologies controlled by laser processing parameters. Electromagnetic processes dominating at initial steps of the progressive grating‐type morphology evolution define the onset of the hydrodynamic processes and resulting random spiky morphology upon subsequent multi‐pulse exposure. Upon systematic studies of femtosecond‐laser processing of monocrystalline Si in oxidation‐preventing methanol, it is shown that the electromagnetic processes dominating at initial steps of the progressive morphology evolution define the onset of the hydrodynamic processes and morphology upon subsequent multi‐pulse exposure. Under promoted exposure quasi‐regular subwavelength laser‐induced periodic surface structures (LIPSSs) are justified to evolve through the template‐assisted development of the Rayleigh‐Plateau hydrodynamic instability in the molten ridges forming quasi‐regular patterns with a supra‐wavelength periodicity and preferential alignment along polarization direction of the incident light. Subsequent exposure promotes fusion‐assisted morphology rearrangement resulting in a spiky surface with random orientation, yet constant inter‐structure distance correlated with initial LIPSS periodicity. Along with the insight onto the physical picture driving the morphology evolution and supra‐wavelength nanostructure formation, this experiments also demonstrated that resulting quasi‐regular and random spiky morphology can be tailored by the intensity/polarization distribution of incident laser beam allowing on‐demand surface nanotexturing with diverse hierarchical surface morphologies exhibiting reduced reflectivity at visible and shortwave‐IR wavelengths. Finally, the practical attractiveness of the suggested approach for improving near‐IR photoresponse and expanding operation spectral range of vertical p‐n junction Si photodetector operating under room temperature and zero‐bias conditions via single‐step annealing‐free nanopatterning is highlighted.

Polarization and kinetics of optical emission during laser induced periodic surface structure formation on crystalline silicon

Polarization-Dependent Anisotropy of LIPSSs' Morphology Evolution on a Single-Crystal Silicon Surface

Coherence effects in LIPSS formation on silicon wafers upon picosecond laser pulse irradiations

Femtosecond Laser Induced Concentric Semi-Circular Periodic Surface Structures on Silicon Based on the Quasi-Plasmonic Annular Nanostructure.

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

The Role of the Laser-Induced Oxide Layer in the Formation of Laser-Induced Periodic Surface Structures

Continuous Modulations of Femtosecond Laser-Induced Periodic Surface Structures and Scanned Line-Widths on Silicon by Polarization Changes

Generation and erasure of femtosecond laser-induced periodic surface structures on nanoparticle-covered silicon by a single laser pulse.

Study of Femtosecond Laser Induced Periodic Structure on Amorphous Silicon Films and Crystallization Characteristics

Liquid-assisted laser nanotexturing of silicon: onset of hydrodynamic processes regulated by laser-induced periodic surface structures

Effect of Polarization on Femtosecond Laser Pulses Structuring Silicon Surface

Liquid‐Assisted Laser Nanotexturing of Silicon: Onset of Hydrodynamic Processes Regulated by Laser‐Induced Periodic Surface Structures

Picosecond Laser-Induced Periodic Surface Structures (LIPSS) on Crystalline Silicon

Mechanism of Femtosecond-Laser-induced Periodic Nanostructure Formation on Crystalline Silicon Surface Immersed in Water

Anisotropy Modulations of Femtosecond Laser Pulse Induced Periodic Surface Structures on Silicon by Adjusting Double Pulse Delay.

Crystal Orientation Dependence of Femtosecond Laser-Induced Periodic Surface Structure on (100) Silicon

Periodic Surface Structures on Dielectrics Upon Femtosecond Laser Pulses Irradiation.

Manipulation of LIPSS Orientation on Silicon Surfaces Using Orthogonally Polarized Femtosecond Laser Double-Pulse Trains.

Formation Mechanisms of Silicon Surface Structuring using Single-Multiple Nanosecond Laser Pulses in Ambient Air and Cold Plasma

Plasma and Ablation Dynamics in Ultrafast Laser Processing of Crystalline Silicon

Direct Writing Anisotropy on Crystalline Silicon Surface by Linearly Polarized Femtosecond Laser