Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Effect of Polarization on Femtosecond Laser Pulses Structuring Silicon Surface

Evolution of Silicon Surface Microstructures by Picosecond and Femtosecond Laser Irradiations

Polarization-Dependent Anisotropy of LIPSSs' Morphology Evolution on a Single-Crystal Silicon Surface

Polarization State Dependence of Laser-Induced Domain Nucleation in Lithium Niobate Crystals Investigated by Digital Holography

Silicon micro-structuring using ultra-short laser pulses

Polarization Effect During Propagation of a Femtosecond Laser Pulse in Fused Silica Glass

Polarization and kinetics of optical emission during laser induced periodic surface structure formation on crystalline silicon

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Picosecond Pulse Laser Microstructuring of Silicon

Silicon Surface Morphologies after Femtosecond Laser Irradiation

Polarization sensitive microstructures fabricated on lithium niobate surfaces by using femtosecond laser pulses

Direct Femtosecond Laser Surface Structuring with Optical Vortex Beams Generated by a q-plate

Polarization-dependent Microstructural Evolution Induced by a Femtosecond Laser in an Aluminosilicate Glass

Amplified Strain-Polarization Response of Geometrically Structured Surfaces

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Effect of Crystallographic Orientation on Structural Response of Silicon to Femtosecond Laser Irradiation

Extreme Sub-Wavelength Structure Formation from Mid-IR Femtosecond Laser Interaction with Silicon

Evolution of polarization dependent microstructures induced by high repetition rate femtosecond laser irradiation in glass.

Laser-induced self-organized periodic nano-hole/nano-ridge structures on the surface of silicon produced with a tightly focused femtosecond pulse laser beam

Possible surface plasmon polariton excitation under femtosecond laser irradiation of silicon

Evolution of Microstructures on Silicon Induced by Femtosecond Laser with Multiple Pulses