Abstract:Self‐organization driven by femtosecond‐laser texturing of crystalline Si in oxidation‐preventing methanol allows to create diverse anti‐reflective surface morphologies controlled by laser processing parameters. Electromagnetic processes dominating at initial steps of the progressive grating‐type morphology evolution define the onset of the hydrodynamic processes and resulting random spiky morphology upon subsequent multi‐pulse exposure. Upon systematic studies of femtosecond‐laser processing of monocrystalline Si in oxidation‐preventing methanol, it is shown that the electromagnetic processes dominating at initial steps of the progressive morphology evolution define the onset of the hydrodynamic processes and morphology upon subsequent multi‐pulse exposure. Under promoted exposure quasi‐regular subwavelength laser‐induced periodic surface structures (LIPSSs) are justified to evolve through the template‐assisted development of the Rayleigh‐Plateau hydrodynamic instability in the molten ridges forming quasi‐regular patterns with a supra‐wavelength periodicity and preferential alignment along polarization direction of the incident light. Subsequent exposure promotes fusion‐assisted morphology rearrangement resulting in a spiky surface with random orientation, yet constant inter‐structure distance correlated with initial LIPSS periodicity. Along with the insight onto the physical picture driving the morphology evolution and supra‐wavelength nanostructure formation, this experiments also demonstrated that resulting quasi‐regular and random spiky morphology can be tailored by the intensity/polarization distribution of incident laser beam allowing on‐demand surface nanotexturing with diverse hierarchical surface morphologies exhibiting reduced reflectivity at visible and shortwave‐IR wavelengths. Finally, the practical attractiveness of the suggested approach for improving near‐IR photoresponse and expanding operation spectral range of vertical p‐n junction Si photodetector operating under room temperature and zero‐bias conditions via single‐step annealing‐free nanopatterning is highlighted.

Mechanism for self-formation of periodic structures on a plastic polymer surface using a nanosecond and femtosecond laser pulses

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Laser‐Induced Reversible and Irreversible Surface Nanostructuring

Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles

Sub-40nm Nanogratings Self-Organized in PVP-based Polymer Composite Film by Photoexcitation and Two Sequent Splitting under Femtosecond Laser Irradiation

Tailoring Sub-micrometer Periodic Surface Structures via Ultrashort Pulsed Direct Laser Interference Patterning

Periodic Microstructure Induced by 532 Nm Polarized Laser Illumination on Poly(urethane-Imide) Film: Orientation of the Azobenzene Chromophore

Ultrafast Large Area Micropattern Generation in Non-absorbing Polymer Thin-Films by Pulsed Laser Diffraction

Periodic Surface Structures on Dielectrics Upon Femtosecond Laser Pulses Irradiation.

Structural Color Generation on Transparent and Flexible Substrates by Nanosecond Laser Induced Periodic Surface Structures

Optical near fields for ablation of periodic structures

The Role of the Laser-Induced Oxide Layer in the Formation of Laser-Induced Periodic Surface Structures

Femtosecond Laser Induced Surface Structuring on Silicon by Diffraction-Assisted Micropatterning

Polarization-Dependent Anisotropy of LIPSSs' Morphology Evolution on a Single-Crystal Silicon Surface

Liquid‐Assisted Laser Nanotexturing of Silicon: Onset of Hydrodynamic Processes Regulated by Laser‐Induced Periodic Surface Structures

Coherence effects in LIPSS formation on silicon wafers upon picosecond laser pulse irradiations

Compound Structures of Periodic Holes and Curved Ripples Fabricated by the Interference Between the Converging Surface Plasmon Polaritons and Femtosecond Laser

Laser‐induced Periodic Surface Structure on a Polymer Surface: the Effect of a Prerubbing Treatment on the Surface Structure

Key role of surface plasmon polaritons in generation of periodic surface structures following single-pulse laser irradiation of a gold step edge

Laser-induced surface structures at polymer surfaces irradiated by ns-UV-laser in water confinement and in air

Femtosecond Laser-Induced Cross-Periodic Structures on A Crystalline Silicon Surface under Low Pulse Number Irradiation