Low-Stress Ultrafast Laser Micromachining for High-Frequency PMN–PT/Epoxy Composite Transducers

Zhihong Lei,Guisheng Xu,Jinfeng Liu,Xuanrong Ji

DOI: https://doi.org/10.1109/jsen.2023.3347881

IF: 4.3

2024-03-02

IEEE Sensors Journal

Abstract:The challenge of achieving micro kerf ( ) for high-frequency ( MHz) composites presents a substantial barrier to the progress of PMN–PT ( – ) transducers. The ultrafast laser offers a promising avenue for micro- and nanoscale manufacturing, yet the research on the intricate mechanisms underlying their interaction with PMN–PT remains limited. In this study, we proposed and validated a technique involving low-stress ultrafast laser micromachining for the production of high-performance PMN–PT composite array transducers. The optical properties were examined. The interaction mechanisms were explored using a 1.5-ps laser system. The microstructures and elements were comprehensively examined as a function of scanning settings, revealing that less affected regions could be achieved. Furthermore, the mechanical performance, including hardness, elasticity modulus, and stresses, was assessed, demonstrating the potential of achieving low stress during micromachining. Raman and piezoelectric force microscopic (PFM) studies provided evidence that high-performance PMN–PT could be attained postmicromachining. Drawing upon the aforementioned physical models, a prototype 30-MHz PMN–PT composite array transducer was developed to validate the efficacy of low-stress micromachining. The composite showed large electromechanical coupling (>0.72). The transducer exhibited an average center frequency of 29.76 MHz, an average −6-dB bandwidth (BW) of 90.5%, and a high peak-to-peak voltage of 746 ± 87 mV at 0-dB gain. We provided valuable insights into the complicated ablation mechanisms generated by ultrafast lasers, which are critical for determining optimal settings, as well as introducing more accessible approaches for producing high-performance PMN–PT composite transducers.

engineering, electrical & electronic,instruments & instrumentation,physics, applied