Flexible capacitive pressure sensor: material, structure, fabrication and application
Caozhen Dong,Yuefeng Bai,Junfeng Zou,Junkai Cheng,Yifei An,Zhentao Zhang,Zihao Li,Siyuan Lin,Shihao Zhao,Nan Li
DOI: https://doi.org/10.1080/10589759.2024.2327639
2024-04-02
Nondestructive Testing And Evaluation
Abstract:Flexible capacitive pressure sensors have garnered significant attention in research areas such as electronic skin, wearable devices, medical diagnosis, physical health detection, and artificial intelligence due to their advantageous characteristics, including high sensitivity, flexibility, lightness, and easy integration. Over the past few years, the field of flexible capacitive pressure sensors has experienced notable advancements in materials, structural design, fabrication processes, and applications. This review aims to examine the different materials employed for sensor electrodes and dielectric layers, as well as the structural design of these sensors. Additionally, we delve into the diverse fabrication processes and techniques utilised, including electrode and dielectric layer fabrication, as well as weaving technology. Lastly, we explore the various applications of flexible capacitive pressure sensors, encompassing electronic skin, health monitoring device, electronic textiles, and structural health monitoring.
materials science, characterization & testing