Research of Finite Element Simulation and Topology Optimization for Capacitive Angular Sensor

Huan-gong WANG,Li-ping WANG,Ning-min KANG

DOI: https://doi.org/10.3969/j.issn.1002-1841.2017.08.030

2017-01-01

Abstract:Sensitive element of a high precision capacitive angular displacement sensor was used as the model,the finite ele-ment method was used to analyze the strain that sensitive element of the capacitive angular displacement sensor displays under the change of mechanical angle,thickness and elastic modulus.The measurement range of the sensor was obtained through the analysis of the strain,and the measurement range can be enlarged or reduced by changing the thickness of the sensing element.Finally,the optimization design of the mechanical structure of the sensitive elements was carried out by using the topology optimization meth-od,and a new topology optimization structure was obtained which can provide reference for the structural design of the sensor's sensing element.