AlGaN/AlN/GaN MOS-HEMTs with Biomolecule Cavity: A Promising Approach for SARS-CoV-2 Biosensors

NUDRAT SUFIYAN,Anup Kumar Sharma
DOI: https://doi.org/10.1088/1361-6641/ada089
IF: 2.048
2024-12-18
Semiconductor Science and Technology
Abstract:In this work, AlGaN/AlN/GaN MOS-HEMTs were investigated with a biomolecule cavity between two oxide layer under the gate region to determine their sensitivity and viability as biosensors. The area between the two oxide layers located below the gate electrode was used to detect the SARS-CoV-2 virus through DNA proteins. Threshold voltage and drain current analysis were carried out by modulating the dielectric of DNA filled in the cavity region to simulate the presence of the virus. The sensitivity of the device was analyzed using the ATLAS SILVACO simulation tool, focusing on various configurations. This included the impact of AlGaN composition (both thickness and Al mole fraction) and cavity configuration (length and thickness of the cavity). The simulation results revealed that device with barrier layer thickness of 15nm and Al mole fraction of 0.2 demonstrates maximum threshold voltage sensitivity SVth (%) of 86% and drain current sensitivity SIds(%)of 75%. Thedevice with cavity length 500 nm and cavity thickness 15 nm shows maximum sensitivity.This research suggests that the proposed structure has potential application in the detection of SARS-COV-2 virus.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter
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