Thermal Conductivity of Large-Area Polycrystalline MoSe 2 Films Grown by Chemical Vapor Deposition

Jie Sun,Kai Dai,Wei Xia,Junhui Chen,Kai Jiang,Yawei Li,Jinzhong Zhang,Liangqing Zhu,Liyan Shang,Zhigao Hu,Junhao Chu
DOI: https://doi.org/10.1021/acsomega.1c03921
IF: 4.1
2021-11-04
ACS Omega
Abstract:It is of great importance to understand the thermal properties of MoSe<sub>2</sub> films for electronic and optoelectronic applications. In this work, large-area polycrystalline MoSe<sub>2</sub> films are prepared using a low-cost, controllable, large-scale, and repeatable chemical vapor deposition method, which facilitates direct device fabrication. Raman spectra and X-ray diffraction patterns indicate a hexagonal (2H) crystal structure of the MoSe<sub>2</sub> film. Ellipsometric spectra analysis indicates that the optical band gap of the MoSe<sub>2</sub> film is estimated to be ∼1.23 eV. From the analysis of the temperature-dependent and laser-power-dependent Raman spectra, the thermal conductivity of the suspended MoSe<sub>2</sub> films is found to be ∼28.48 W/(m·K) at room temperature. The results can provide useful guidance for an effective thermal management of large-area polycrystalline MoSe<sub>2</sub>-based electronic and optoelectronic devices.
chemistry, multidisciplinary
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