Abstract:Traditional technologies for far-infrared (FIR) spectroscopy generally involve bulky dispersive optics. Integrated filter bank spectrometers promise more compact designs, but implementations using superconducting transmission line networks become lossy at terahertz frequencies. We describe a novel on-chip spectrometer architecture designed to extend this range. A filter bank spectrometer is implemented using vacuum waveguide etched into a silicon wafer stack. A single trunk line feeds an array of resonant cavities, each coupled to a kinetic inductance detector fabricated on an adjacent wafer. We discuss the design and fabrication of a prototype implementation, initial test results at ambient temperature, and prospects for future development.

What problem does this paper attempt to address?

This paper aims to address the limitations of existing technologies in far - infrared (FIR) band spectroscopy. Traditional techniques usually use bulky dispersive optical elements, which are difficult to scale to high pixel numbers and large fields of view in space missions. The paper proposes a new on - chip spectrometer architecture based on a vacuum - waveguide filter bank to achieve a more compact design and extend to the terahertz frequency range. Specifically, the paper describes the following aspects: 1. **Problem Background**: - Spectral observations in the far - infrared band can provide important information about the cold and dusty universe. - Future far - infrared missions require compact, low - noise spectrometer solutions that can place thousands of sensors outside the Earth's atmosphere. - Existing spectrometer architectures (such as grating spectrometers, Fourier - transform spectrometers, and Fabry - Perot interferometers), although performing well, are bulky and difficult to scale in space missions. 2. **Solution**: - A new spectrometer architecture based on a vacuum - waveguide filter bank is proposed. - This architecture is implemented by etching vacuum waveguides in a silicon wafer stack, with a single backbone feeding a series of resonant cavities, each resonant cavity being coupled to a kinetic - inductance detector (KID). - This design can significantly reduce the volume, improve the integration, and be applicable to the terahertz frequency range. 3. **Design and Fabrication**: - The paper discusses in detail the design and fabrication process of the prototype implementation, including the initial test results and the prospects for future development. - Using modern micromachining techniques, high - precision vertical - wall structures are achieved, and the loss is reduced by sputtering a gold layer. 4. **Preliminary Test Results**: - Preliminary test results show that the spectrometer can achieve a performance of \( Q\sim100 \) at room temperature. - It is expected that the performance will be further improved under low - temperature conditions. In conclusion, this paper attempts to solve the limitations of existing far - infrared spectrometers in terms of volume, integration, and frequency range by developing a new type of vacuum - waveguide - filter - bank spectrometer, thereby providing more advanced spectrometer solutions for future space missions.

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