Programmable Nanoscale Crack Lithography for Multiscale PMMA Patterns

Zhiwen Shu,Fuhua Ye,Peng Liu,Pei Zeng,Huikang Liang,Lei Chen,Xiaoqing Zhang,Yiqin Chen,Zhichao Fan,Jianwu Yu,Huigao Duan
DOI: https://doi.org/10.1021/acsami.3c02625
IF: 9.5
2023-06-01
ACS Applied Materials & Interfaces
Abstract:Crack lithography is important for preparing microstructured materials. This strategic use of cracking breaks with the traditional idea that cracks are unwanted and has great potential for high-resolution and high-throughput production. However, our ability to control nanoscale crack patterning is still insufficient. Here, we present a nanoscale, programmable angle-dependent technique to control crack generation that relies on standard electron-beam lithography. Multiscale patterns of...
materials science, multidisciplinary,nanoscience & nanotechnology
What problem does this paper attempt to address?