A novel and potentially scalable CVD-based route towards SnO2:Mo thin films as transparent conducting oxides

Tianlei Ma,Marek Nikiel,Andrew G. Thomas,Mohamed Missous,David J. Lewis
DOI: https://doi.org/10.1007/s10853-021-06269-3
IF: 4.5
2021-07-12
Journal of Materials Science
Abstract:Abstract In this report, we prepared transparent and conducting undoped and molybdenum-doped tin oxide (Mo–SnO 2 ) thin films by aerosol-assisted chemical vapour deposition (AACVD). The relationship between the precursor concentration in the feed and in the resulting films was studied by energy-dispersive X-ray spectroscopy, suggesting that the efficiency of doping is quantitative and that this method could potentially impart exquisite control over dopant levels. All SnO 2 films were in tetragonal structure as confirmed by powder X-ray diffraction measurements. X-ray photoelectron spectroscopy characterisation indicated for the first time that Mo ions were in mixed valence states of Mo(VI) and Mo(V) on the surface. Incorporation of Mo 6+ resulted in the lowest resistivity of $$7.3 \times 10^{{ - 3}} \Omega \,{\text{cm}}$$ 7.3 × 10 - 3 Ω cm , compared to pure SnO 2 films with resistivities of $$4.3\left( 0 \right) \times 10^{{ - 2}} \Omega \,{\text{cm}}$$ 4.3 0 × 10 - 2 Ω cm . Meanwhile, a high transmittance of 83% in the visible light range was also acquired. This work presents a comprehensive investigation into impact of Mo doping on SnO 2 films synthesised by AACVD for the first time and establishes the potential for scalable deposition of SnO 2 :Mo thin films in TCO manufacturing. Graphical abstract
materials science, multidisciplinary
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