A Novel Compliant Nanopositioning Stage Driven by a Normal-Stressed Electromagnetic Actuator

Li Chen,Yuhan Niu,Xu Yang,Wu-Le Zhu,Li-Min Zhu,Zhiwei Zhu

DOI: https://doi.org/10.1109/tase.2021.3105683

IF: 6.636

2021-01-01

IEEE Transactions on Automation Science and Engineering

Abstract:This article reports on the design, modeling, control, and testing of a novel compliant nanopositioning stage driven by a self-developed normal-stressed electromagnetic actuator. To facilitate the parameter selection for the stage to achieve the desired stroke and natural frequency, an analytical model of both the electromagnetic circuit and flexure mechanism is established, which is then systematically verified through finite element analysis. By combining a proportional—integral—differential (PID)-based main controller with a system dynamics inversion-based feedforward compensator, a closed-loop control system for the stage is constructed with the main controller being tuned through Bode's ideal transfer function-based loop-shaping method. The experimental result shows that a stroke of <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="15.708ex" height="2.509ex" style="vertical-align: -0.671ex; margin-left: -0.089ex;" viewBox="-38.5 -791.3 6763 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-70" x="0" y="0"></use> <use xlink:href="#MJMATHI-6D" x="503" y="0"></use><g transform="translate(1382,0)"> <use xlink:href="#MJMAIN-39"></use> <use xlink:href="#MJMAIN-35" x="500" y="0"></use></g> <use xlink:href="#MJMATHI-6D" x="2633" y="0"></use> <use xlink:href="#MJMATHI-75" x="3511" y="0"></use> <use xlink:href="#MJMATHI-74" x="4084" y="0"></use> <use xlink:href="#MJMATHI-65" x="4445" y="0"></use> <use xlink:href="#MJMATHI-78" x="4912" y="0"></use> <use xlink:href="#MJMATHI-74" x="5484" y="0"></use> <use xlink:href="#MJMATHI-6D" x="5846" y="0"></use></g></svg></span> and a first natural frequency of 743 Hz are achieved for the designed stage. Finally, taking advantage of the constructed control system, the nanopositioning capability is demonstrated by finely tracking the harmonic and nanostair commands. Note to Practitioners—Piezoelectric actuators (PEAs) and voice coil motors (VCMs) are commonly adopted for the actuation of nanopositioning stages. In general, constrained by the inherent small strain, PEA is more suitable for the generation of dynamic motions in dozens of micrometers. Meanwhile, VCM has a theoretically infinite motion range but a slow response due to its low force density nature. Taking advantage of a newly developed normal-stressed electromagnetic actuator (NSEA), we demonstrate the design, modeling, control, and testing of an NSEA-based nanopositioning stage with a relatively long motion range, high bandwidth, and compact size. 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automation & control systems