Direct localized growth of graphene on substrate: a novel nickel-catalyzed CVD process assisted by H2 plasma

Giuseppe Valerio Bianco,Zhuohui Chen,Giovanni Bruno
DOI: https://doi.org/10.1039/d4na00508b
IF: 5.598
2024-10-01
Nanoscale Advances
Abstract:An original metal catalyzed CVD methodology assisted by hydrogen plasma for the direct deposition of few-layer graphene on substrate is presented. Graphene is grown at 900°C directly on the surface of the substrate of technological interest by carbon diffusion through nickel film by using methane (CH 4 ) as carbon precursor. Hydrogen atoms in the H 2 plasma downstream are used to promote the solubilization of carbon atom in Ni, thus, favouring the growth of graphene at Ni/substrate interface. Structural and transport properties of the as grown multilayer graphene films on SiO 2 /Si and quartz substrates are provided. We demonstrate the peculiarity of this approach for controlling the thickness and transport properties of as grown graphene film by process-step times. Finally, the potential of the proposed methodology for the bottom-up direct growth of patterned graphene is demonstrated.
materials science, multidisciplinary,nanoscience & nanotechnology,chemistry
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