Abstract:It is significant to prepare large-scale and high-quality graphene on SiC substrate for the research of the device in nanoelectronics. This review presents a brief overview on the progress in the growth mechanism for epitaxial graphene on SiC substrate surface, the methods of modification and the research of graphene-based devices. Graphene has attracted the interest of the scientists due to its exceptional electronic properties, which make it a promising material for nanoelectronics. Nowadays, the high-quality epitaxial graphene can be obtained with the smooth morphology, few defects, large size by controling the environment, annealing temperature and vapor pressure. The special structure that the first carbon layer grown above the Si-terminated SiC substrate form strong covalent bonds with substrate, results in some unusual properties such as opening a band gap in the graphene bilayer and a n-type doping of the graphene layers. The rotated fault, which is owed to decoupling effect, has been observed in C-terminated multilayer graphene. And such intrinsic properties of graphene depend on the atom type of SiC surface, surface state, weakness of bonds and the transformation of the electrons between the few-layer graphene and SiC substrate. Some limitations (such as little band gap, intrinsic n-type character, etc.) resulted from the properties of epitaxial graphene must be overcome for the device application. Thus tremendous effort has been devoted to achieve the deliberate control of the band gap, the density and character of its charge carriers. Having a deep understanding of the unique properties for epitaxial graphene, this article then selectively reviews modification methods by considing the type of atoms, size of atoms, work function and electron affinity. In order to manufacture well-behaved devices, many of the fundamental problems of graphene-based eletronics, including methods to make metal contacts, nanoscale patterning and other technical details should be addressed perfectly. It is also important to control the material of gate, modulate the face of substrate, the width of channel in order to improve the performance of the graphene-based devices such as carrier mobility and I-on/I-off ratios. The combination between the experiment and calculation (such as Monte Carlo simulation, density functional theory, molecular dynamics simulation etc.) can make a deeper understanding of the effects of SiC substrate and the methods of modification, which can be served as a guide for further research.

Direct growth of single-layer graphene on Ni surface manipulated by Si barrier

Direct growth of bilayer graphene on SiO₂ substrates by carbon diffusion through nickel.

A facile approach to direct growth of layer-tunable graphene on Ge substrate

Growth of homogeneous single-layer graphene on Ni-Ge binary substrate

Interfacial monolayer graphene growth on arbitrary substrate by nickel-assisted ion implantation

Growth of bilayer graphene on insulating substrates.

A Novel Method for Direct Growth of A Few-Layer Graphene on Al2o3 Film

Direct Growth of Graphene on Silicon by Metal-Free Chemical Vapor Deposition

Direct Graphene Growth on Insulator

Progress of Properties, Modification and Applications of Graphene on SiC Substrate

Direct localized growth of graphene on substrate: a novel nickel-catalyzed CVD process assisted by H2 plasma

Preparation of few-layer graphene by annealing Ni film with low carbon content deposited by direct current magnetron sputtering

Transfer-Free Layered Graphene on Silica via Segregation through a Nickel Film for Electronic Applications

One-step Chemical Vapor Synthesis of Ni/graphene Nanocomposites with Excellent Electromagnetic and Electrocatalytic Properties

Wafer-Scale Graphene Growth on Si/SiO 2 Substrates via Metal-Free Chemical Vapor Deposition

Metal-Free Catalytic Preparation of Graphene Films on a Silicon Surface Using CO as a Carbon Source in Chemical Vapor Deposition

Self-Terminating Confinement Approach for Large-Area Uniform Monolayer Graphene Directly over Si/Siox by Chemical Vapor Deposition

Direct synthesis of single-crystal bilayer graphene on various dielectric substrates

Direct chemical vapor deposition growth of graphene on Ni particles using solid carbon sources

Multilayer graphene growth by a metal-catalyzed crystallization of diamond-like carbon

Molten Ga-Pd alloy catalyzed interfacial growth of graphene on dielectric substrates