Modification of structure and wear resistance of closed-field unbalanced-magnetron sputtered MoS2 film by vacuum-heat-treatment

Rui Zhang,Qifeng Cui,Lijun Weng,Jiayi Sun,Ming Hu,Yanlong Fu,Desheng Wang,Dong Jiang,Xiaoming Gao
DOI: https://doi.org/10.1016/j.surfcoat.2020.126215
IF: 4.865
2020-11-01
Surface and Coatings Technology
Abstract:<p>MoS<sub>2</sub> film deposited was deposited by closed-field unbalanced-magnetron sputtering (CFUBMS), and its structural and tribological properties were modified by the heat treatment at temperature range of 100–500 °C in vacuum environment. Results revealed that as-deposited MoS<sub>2</sub> film was composed of MoS<sub>2</sub> plus a little MoO<sub>3</sub> with a dense amorphous-like structure. After the vacuum heat treatment, MoS<sub>2</sub> film was still very compact, but its microstructure was changed from amorphous-like to nano-crystalline states with the increase of heat treatment temperature. As a result, a MoS<sub>2</sub> film with a microstructure of MoS<sub>2</sub> nanocrystals embedded into its own amorphous matrix was obtained at middle temperature of 200 °C. Furthermore, MoO<sub>3</sub> phase in the film was reduced to MoO<sub>2</sub> after the vacuum heat treatment at high temperatures of 400 and 500 °C. Friction tests revealed that the wear resistance of MoS<sub>2</sub> film in vacuum environment was significantly improved by the vacuum heat treatment at suitable temperature. The wear life of vacuum-heat-treated MoS<sub>2</sub> film at 200 °C for 3 h was ~6.2 × 10<sup>5</sup> r, about four times longer than that of as-deposited MoS<sub>2</sub> film.</p>
physics, applied,materials science, coatings & films
What problem does this paper attempt to address?