Abstract:High‐quality crystalline micro‐ and nanostructures based on inorganic semiconductors including zinc oxide (ZnO) have attracted considerable interest in electronic and optoelectronic applications due to their outstanding properties. ZnO micro‐ and nanocrystals can be fabricated by the moderate and high throughput hydrothermal synthesis. Yet it is restricted by patterning large‐area ZnO crystals with high‐quality and programmable geometries through the hydrothermal process for the optoelectronic integration. Here, a capillary‐bridge manipulation approach is demonstrated to control the dewetting process of ZnO precursor solution for patterning precursor arrays. Based on precursor arrays, vertically aligned high‐quality ZnO microrod arrays with homogeneous morphology and pure crystallographic orientation are fabricated via a hydrothermal epitaxial method. Statistical results and crystallization theories guide the experimental optimization and discussion of the crystallization mechanism, dominated by the competition between homogeneous nucleation and heterogeneous nucleation. High‐quality ZnO microbelt arrays are achieved through a surfactant‐mediated hydrothermal method after ZnO microrod arrays are transferred to a polydimethylsiloxane substrate. Photodetectors based on ZnO microbelts exhibit a high responsivity of 2.3 × 104 A W−1, a light on–off ratio exceeding 105, and stable recyclability. It is anticipated that this work provides new insights into patterning inorganic high‐quality micro‐ and nanostructures for multi‐functional integrated devices.

Femtosecond-laser-induced suprawavelength two-dimensional ZnO microstructures for multi-wavelength photodetector devices

Single-color Peripheral Photoinhibition Lithography of Nanophotonic Structures

Infrared Femtosecond Laser-Induced Great Enhancement of Ultraviolet Luminescence of ZnO Two-Dimensional Nanostructures

Micropattern-assisted absorption enhancement and wettability surface on ZnO via single femtosecond laser beam tailoring

Multi-Photon Excitation Uv Emission by Femtosecond Pulses and Nonlinearity in Zno Single Crystal

Ultraviolet photodetectors based on ZnO nanowires with SiO2/ZnO multilayers

High performance 1D–2D CuO/MoS<sub>2</sub> photodetectors enhanced by femtosecond laser-induced contact engineering

Simultaneous Formation of Two Types of Periodic Nanostructure in ZnO Single Crystal by Femtosecond Laser Direct Irradiation

Combinatorial tuning of structure and optoelectronic properties of Zn-Ga-O thin films for deep ultraviolet photodetection

Ligand-directed rapid formation of ultralong ZnO nanowires by oriented attachment for UV photodetectors

Ultrafast dynamics in ZnO thin films irradiated by femtosecond lasers

Multi-Photon Excitation in Zno Material by Femtosecond Pulses

Upconversion luminescence and optical power limiting effect based on two- and three-photon absorption processes of ZnO crystal

Controlled Growth of High-Quality ZnO-Based Films and Fabrication of Visible-Blind and Solar-Blind Ultra-Violet Detectors

Deep-subwavelength ripples on the ZnO surface obtained via metal-film-assisted femtosecond laser processing

A uniform 290 nm periodic square structure on ZnO fabricated by two-beam femtosecond laser ablation

A novel ultra-thin-walled ZnO microtube cavity supporting multiple optical modes for bluish-violet photoluminescence, low-threshold ultraviolet lasing and microfluidic photodegradation

Colloidal Chemically Fabricated Zno : Cu-Based Photodetector with Extended Uv-Visible Detection Waveband

High performance ZnO quantum dot (QD)/ magnetron sputtered ZnO homojunction ultraviolet photodetectors

Controllable Heterogeneous Nucleation for Patterning High‐Quality Vertical and Horizontal ZnO Microstructures toward Photodetectors

Multi-photon route to ultraviolet nanowire lasers