Surface roughness metrology with a raster scanning single photon LiDAR

Daniel Tafone,Luke McEvoy,Yong Meng Sua,Yu-Ping Huang

DOI: https://doi.org/10.1364/ao.537404

IF: 1.9

2024-10-16

Applied Optics

Abstract:Daniel Tafone, Luke McEvoy, Yong Meng Sua, Yu-Ping Huang We explore a novel, to the best of our knowledge, approach to surface roughness metrology utilizing a single pixel, raster scanning single ... [Appl. Opt. 63, 7917-7922 (2024)]

optics

What problem does this paper attempt to address?

Survey of measurement methods for surface roughness

Bin Liu,Qi-bo FENG,Cui-fang KUANG

DOI: https://doi.org/10.3969/j.issn.1005-5630.2004.05.012

2004-01-01

Abstract:Surface roughness is an important parameter to reflect the micro-geometry in machine process, and also an important part of modern precise measurement technique. Contact measurement and noncontact measurement was summarized in this paper, and the advantages and disadvantages are disucssed. Some ideas about it's trend are given in the end.
Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Yueying Wang,Xu Liu,Xiang Hao

DOI: https://doi.org/10.3788/LOP230533

2023-01-01

Laser & Optoelectronics Progress

Abstract:With the rapid development of precision instrument manufacturing and semiconductor processing industry, the observation and measurement of micro-structure surface profile has become an important orientation of scientific research. Laser scanning confocal microscopy becomes popular in three-dimensional (3D) surface topography because of its high resolution, high signal- to-noise ratio, and excellent optical sectioning ability. In this paper, we first introduce the basic principle of the confocal microscopy. Further, various confocal microscopic methods used in 3D surface topography measurement are reviewed, including different scanning methods, different detection methods, and different spectral- based confocal imaging methods. Finally, the future developments of confocal microscopy are also prospected.
A Measurement System for the Roughness of Ultra Smooth Surface with Large Aperture

Yongrong Yang

2004-01-01

Abstract:The described optical system,which is used to measure the roughness of ultra smooth surface,forms a common-path interference,so a nondestructive detection can be carried out by it without standard reference plane.In consequence of the way that the optical interference sensor is moved rather than the specimen while measuring,the system can be used to measure the optical component in great dimension.The lateral resolution of measurement system is 0.5μm,and the vertical one is 0.1nm.The repeatability of the system is better than 2%.
Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

ZR Zheng,ZP Yu,XT Sun,J Zhou,PF Gu

IF: 0.6

2010-01-01

Optica Applicata

Abstract:Light scattering from micro-rough surface is discussed firstly in this paper, then the relationship of BRDF(Bidirectional Reflectance Distribution Function) of light scattering from micro-rough surface with TIS(Total Integrated Scattering) is analyzed. Moreover, roughness statistical characterization such as RMS(Root Mean Square roughness), PSD(Power Spectral Density function) are deduced by TIS(total integrated scattering) of polished surface. And, an automatic measure system of light scattering with one dimensional scanning method is introduced, the layout of system and optical sub-system are illuminated. Based on the light scattering measurements system, BRDF of two kind of polished surfaces (silica surface and Ag reflector) have been tested, and PSD of two surfaces have been given by light scattering measurements, roughness characterization of two surfaces have been compared with the tested data by profile mete. Result shows that light scattering measurement method has high precision on nondestructive measurement for polishing surfaces.
Remote measurement of surface roughness, surface reflectance, and body reflectance with LiDAR

Xiaolu Li,Yu Liang

DOI: https://doi.org/10.1364/AO.54.008904

2015-10-20

Abstract:Light detection and ranging (LiDAR) intensity data are attracting increasing attention because of the great potential for use of such data in a variety of remote sensing applications. To fully investigate the data potential for target classification and identification, we carried out a series of experiments with typical urban building materials and employed our reconstructed built-in-lab LiDAR system. Received intensity data were analyzed on the basis of the derived bidirectional reflectance distribution function (BRDF) model and the established integration method. With an improved fitting algorithm, parameters involved in the BRDF model can be obtained to depict the surface characteristics. One of these parameters related to surface roughness was converted to a most used roughness parameter, the arithmetical mean deviation of the roughness profile (Ra), which can be used to validate the feasibility of the BRDF model in surface characterizations and performance evaluations.
Surface Form Metrology of Micro-Optics

Bin Xu,Zhigang Jia,Xinghui Li,Yuan-Liu Chen,Yuki Shimizu,So Ito,Wei Gao

DOI: https://doi.org/10.1117/12.2019243

2013-01-01

Abstract:This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.
Single-Shot White-Light Dispersive Interferometric Profilometer

Pei Zhu,Kaiwei Wang,Shuangshuang Zhao

DOI: https://doi.org/10.1117/12.869987

2010-01-01

Abstract:Traditional interferometric profilemeter suffers from phase ambiguity problem and sensitivity to environmental disturbance, thus preventing their applications for on-line surface inspections. We propose a new method to obtain the object surface's two-dimensional profile in a single shot using a dispersive interferometer. An air-spaced Fabry-Perot etalon was applied in order to decompose the light from the broadband source into discrete monochromatic constituents with equal wavelength interval. A blazed grating is implemented to effectively separate the interferograms of difference wavelength. As a result, the interference patterns of different wavelengths distributed separately on the CCD camera. By analyzing these patterns one can get the configuration of the original surface. A one-dimensional profiling experiment is carried out to test a surface with steps and the mean error of the result is below 0.2 mu m.
Real Time Measurement of Surface Roughness Using Laser Technique

LUO Jianbin,WANG Wen,Patrick,P.L.Wong,WEN Shizhu

DOI: https://doi.org/10.3321/j.issn:1000-0054.1999.02.002

1999-01-01

Abstract:A discussion about recently developed methods for measuring the roughness of the dynamic surface in process has been taken. In order to overcome disadvantages of the present methods, a new technique using dark region ratio of the reflected laser to determine the dynamic surface roughness is proposed. The measuring range of surface roughness is from 0.05μm to 1.6μm or from 0.4μm to 12.5μm which is related to the reflected initial average optical intensity. The influence factors such as speed, initial optical intensity on the dark region ratio have been discussed. The measuring results are very close to that measured by Telyer soft.
Nanometer Scale Roughness Measurements with Atomic Force Microscopes

陈英飞,章海军,张冬仙

DOI: https://doi.org/10.3969/j.issn.1005-5630.2003.04.005

2003-01-01

Abstract:A system of atomic force microscope applied to nanometer scale surface roughness measuring is introduced, and the emphasis is laid on software implementation method. The experiment results show that the system can be well used to measure 1-D surface roughness of a line in random horizontal or vertical direction and the surface roughness of random area. The three dimensional spatial measuring resolution of surface roughness has reached nanometer scale, which will satisfy the need of nanometer scale surface topography research very well.
Surface Roughness Measurement Based on Non-Diffracting Beam Triangulation and Grey Evaluation

WANG Zhong-yu,WANG Qian,MENG Hao,WANG Xue

DOI: https://doi.org/10.3969/j.issn.1002-2082.2011.05.019

2011-01-01

Abstract:Laser triangulation method is normally used in the non-contact precision measurement of surface topography due to its simplicity and robustness.In the traditional laser triangulation method,a Gaussian beam is used to scan the measured surface point-by-point.Since data collecting is completed with point scanning,a large number of measurements are needed to obtain the surface topography of the whole surface.Taking non-diffracting light as the incident light of the laser triangulation measurement system,the non-contact precision measurement for surface roughness is fulfilled with a higher speed and it solves the focal depth problem of the Gaussian beam.The evaluation method of the surface roughness based on the grey filtering overcomes the shortages of the existing evaluation methods and is complementary to Gaussian filtering method.The measurement results show that the system measures the surface roughness accurately and the proposed grey evaluation method is effective.
Non-Contact Surface Roughness Measurement by Implementation of a Spatial Light Modulator

Laura Aulbach,Félix Salazar Bloise,Min Lu,Alexander W. Koch,Alexander Koch

DOI: https://doi.org/10.3390/s17030596

IF: 3.9

2017-03-15

Sensors

Abstract:The surface structure, especially the roughness, has a significant influence on numerous parameters, such as friction and wear, and therefore estimates the quality of technical systems. In the last decades, a broad variety of surface roughness measurement methods were developed. A destructive measurement procedure or the lack of feasibility of online monitoring are the crucial drawbacks of most of these methods. This article proposes a new non-contact method for measuring the surface roughness that is straightforward to implement and easy to extend to online monitoring processes. The key element is a liquid-crystal-based spatial light modulator, integrated in an interferometric setup. By varying the imprinted phase of the modulator, a correlation between the imprinted phase and the fringe visibility of an interferogram is measured, and the surface roughness can be derived. This paper presents the theoretical approach of the method and first simulation and experimental results for a set of surface roughnesses. The experimental results are compared with values obtained by an atomic force microscope and a stylus profiler.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
New methods for measuring of surface landscape

C.Yu. Zenkova,Dmytro I. Ivanskyi,V.M. Tkachuk,Yan Wenjun

DOI: https://doi.org/10.1117/12.2615517

2021-01-01

Abstract:In this paper a new approach that enables to analyze the structure and reconstruct a rough surface with inhomogeneities is suggested, for which the heights distribution from the trough to the upper point is about 20 nm. For such diagnostics, carbon nanoparticles are used, which are characterized by luminescence in the yellow-green region of the spectrum and such a value of the dipole moment, which makes it possible to control the distribution of nanoparticles over the surface even in the presence of an external electric field. As a probe for diagnosing nanoparticles, it is suggested to use structured light with a significant longitudinal field component, which largely removes the limitations imposed by the transverse resolution of the optical system. The recorded luminescence of carbon nanoparticles with dipole moment oriented parallel to the longitudinal component of the field, enabled not only to reproduce the location of maxima and minima of the surface with an accuracy of 12.9%, but also to reconstruct the landscape of the studied surface itself at a level of 6.76% error.
Hybrid micro/nano-structure formation by angular laser texturing of Si surface for surface enhanced Raman scattering.

Kaichen Xu,Chentao Zhang,Rui Zhou,Rong Ji,Minghui Hong

DOI: https://doi.org/10.1364/OE.24.010352

IF: 3.8

2016-01-01

Optics Express

Abstract:Surface enhanced Raman spectroscopy (SERS) has drawn much research interest in the past decades as an efficient technique to detect low-concentration molecules. Among many technologies, which can be used to fabricate SERS substrates, laser ablation is a simple and high-speed method to produce large-area SERS substrates. This work investigates the angular texturing effect by dynamic laser ablation and its influence on SERS signals. By tuning the angle between the Si surface and laser irradiation, the distributions and sizes of laser induced hybrid micro/nano-structures are studied. By decorating with a silver film, plenty of hot spots can be created among these structures for SERS. It is found that when the incident laser angle is 15 degrees at the laser fluence of 16.0 J/cm(2), the SERS performance is well optimized. This work realizes antisymmetric distribution of nanoparticles deposited on Si surface, which provides a flexible tuning of the hybrid micro/nano-structures' fabrication with high controllability for practical applications. (C) 2016 Optical Society of America
Fluorescence Record Diagnostics of 3D Rough-Surface Landscapes With Nano-Scale Inhomogeneities

O. V. Angelsky,A. Y. Bekshaev,C. Yu. Zenkova,D. I. Ivansky,J. Zheng,V. M. Tkachuk

DOI: https://doi.org/10.3389/fphy.2021.787821

IF: 3.718

2022-01-13

Frontiers in Physics

Abstract:The paper proposes a new approach that enables the structure analysis and reconstruction of a rough surface where the height of inhomogeneities (from the depression to the upper point) varies within the spread about 20 nm. For the surface diagnostics, carbon nanoparticles are used, which serve as sensitive probes of the local surface height. A single nanoparticle can be positioned at a desirable point of the studied surface with the help of an optical tweezer employing the He-Ne laser radiation. Then the particle is illuminated by the strongly focused exciting beam of 405 nm wavelength, with the waist plane precisely fixed at a certain distance from the surface base plane. The particle’s luminescence response (in the yellow-green spectral range) strongly depends on the distance between the exciting beam waist and the particle, thus indicating the local height of the surface. After scanning the surface area and the consecutive interpolation, the surface “vertical” landscape can be reconstructed with a high accuracy: the numerical simulation shows that the RMS surface roughness is restored with an accuracy of 6.9% while the landscape itself is reconstructed with the mean error 7.7%.

physics, multidisciplinary
Portable angle-resolved scattering system to measure high spatial frequency roughness for ultra-smooth surfaces

Zihan Chen,Zhenxiong Jian,Cheng Chen,Mingjun Ren,Rong Su

DOI: https://doi.org/10.1016/j.optlaseng.2024.108031

IF: 5.666

2024-01-17

Optics and Lasers in Engineering

Abstract:Ultra-smooth surfaces require stringent quality control of their high spatial frequency roughness (HSFR). Angle-resolved scattering (ARS) allows for fast, non-contact roughness measurement that is insensitive to environmental disturbances. However, there is a tradeoff between the roughness measurement bandwidth and the measurement speed for the current ARS methods. We propose a rapid ARS method for HSFR measurement. A prototype instrument is developed using 405 nm laser illumination and a CMOS sensor to capture the scattering distribution. By solving the inverse scattering problem under the Kirchhoff approximation, the power spectral density function can be obtained, from which the root mean square roughness is calculated. The method allows measurement of HSFR from 1 μm −1 to 2.5 μm −1 over a 2 mm area in one minute. Experiments on polished metal flats showed excellent agreement between our method and atomic force microscopy.

optics
Surface-roughness measurement based on scalar field correlation with active millimeter-wave imaging system.

Ziye Wang,Yang Yu,Lingbo Qiao,Yingxin Wang,Ziran Zhao

DOI: https://doi.org/10.1364/AO.58.009186

IF: 1.9

2019-01-01

Applied Optics

Abstract:Active millimeter-wave (MMW) imaging is of interest because it has played an important role in the area of personnel surveillance over the past decades. Through reconstructing reflectivity, potential threats can be recognized based on shape. Besides reflectivity, diverse physical characteristics should be explored so that supplementary information can be used to assist recognition. This paper presents a surface-roughness measurement method using holographic data that has already been acquired during security checks. Based on scalar diffraction theory and speckle metrology, a simple mathematical relation between the correlation of holographic fields and surface roughness has been derived. Consequently, another kind of information, that is, the surface-roughness estimate, can be used to help differentiate similarly shaped articles. Results of simulations and laboratory experiments have shown its validation and potential in application to MMW imaging systems. (C) 2019 Optical Society of America
Challenges in the areal measurement of surface roughness and shape at the micro and nanoscale

P C Montgomery,M Guellil,P Pfeiffer,B Serio,F Anstotz,L Pramatarova,S Roques

DOI: https://doi.org/10.1088/1742-6596/558/1/012005

2014-12-03

Journal of Physics: Conference Series

Abstract:Measuring surface roughness accurately at the micro and nano scale presents several challenges. While optical techniques can be used to rapidly measure large areas, significant variations can be found between results from different techniques on similar samples. In the present work, a comparison has been made between the results of two different systems using interference microscopy and AFM to make measurements at the same place on the same sample. Two samples were prepared on silicon wafers by marking them with a multi-scale pattern using a photoresist process of lithography from an optical mask, followed by reactive ion etching. One was left bare and the other was prepared with a rough layer of hydroxyapatite before measuring at the chosen positions. Comparison of the results showed that while the general shapes of the measured surface microstructures were similar, several differences were found. For example, there was a variation of up to 7% between techniques in the measurement of the depths of the etched features and artefacts were also visible at square edges. These results show the need to pay careful attention to instrument calibration and probe/surface interactions in order to improve the accuracy of surface characterization of surface roughness and topography.
A new optical technique for roughness measurement on moving surface

W. Wang,P. L. Wong,J. B. Luo,Z. Zhang

DOI: https://doi.org/10.1016/S0301-679X(98)00034-6

IF: 5.62

1998-01-01

Tribology International

Abstract:A new optical technique which allows the roughness of moving surfaces to be determined was developed. The new technique which is called the dark/bright ratio (DBR) method utilizes the combined effects of speckle and scattering phenomena. The roughness of surfaces is inferred from the dimensions of the recorded dark or bright area in the speckle pattern. Although it is a relative method, it has great potential to be used for in-process measurement and automation owing to the simplicity of both its principle and required optical set-up. The new technique has also been proved to have large measuring range and with high precision, The principle of this technique and the set-up of the measuring system are described. Experimental results for both static and dynamic conditions, which were compared to those obtained using the traditional stylus technique, were found to be in good agreement. The reliability of the new technique in obtaining roughness data of surfaces under various speed conditions (from 0 to 0.017 m/s) was validated. (C) 1998 Elsevier Science Ltd. All rights reserved.
Compact Single-Shot Dual-Wavelength Interferometry for Large Object Measurement with Rough Surfaces

Yizhang Yan,Suhas P. Veetil,Pengfei Zhu,Feng Gao,Yan Kong,Xiaoliang He,Aihui Sun,Zhilong Jiang,Cheng Liu

DOI: https://doi.org/10.3390/photonics11060518

IF: 2.536

2024-05-29

Photonics

Abstract:Single-shot dual-wavelength interferometry offers a promising avenue for surface profile measurement of dynamic objects. However, current techniques employing pixel multiplexing or color cameras encounter challenges such as complex optical alignment, limited measurement range, and difficulty in measuring rough surfaces. To address these issues, this study presents a novel approach to single-shot dual-wavelength interferometry. By utilizing separated polarization illumination and detection, along with a monochromatic polarization camera and two slightly different wavelengths, this method enables the simultaneous recording of two frames of separated interferometric patterns. This approach facilitates straightforward optical alignment, expands measurement ranges, accelerates data acquisition, and simplifies data processing for dual-wavelength interferometry. Consequently, it enables online shape measurement of large dynamic samples with rough surfaces.

optics
Light-Sheet Microscopy for Surface Topography Measurements and Quantitative Analysis

Zhanpeng Xu,Erik Forsberg,Yang Guo,Fuhong Cai,Sailing He

DOI: https://doi.org/10.3390/s20102842

IF: 3.9

2020-01-01

Sensors

Abstract:A novel light-sheet microscopy (LSM) system that uses the laser triangulation method to quantitatively calculate and analyze the surface topography of opaque samples is discussed. A spatial resolution of at least 10 mu m in z-direction, 10 mu m in x-direction and 25 mu m in y-direction with a large field-of-view (FOV) is achieved. A set of sample measurements that verify the system ' s functionality in various applications are presented. The system has a simple mechanical structure, such that the spatial resolution is easily improved by replacement of the objective, and a linear calibration formula, which enables convenient system calibration. As implemented, the system has strong potential for, e.g., industrial sample line inspections, however, since the method utilizes reflected/scattered light, it also has the potential for three-dimensional analysis of translucent and layered structures.

Surface roughness metrology with a raster scanning single photon LiDAR

Survey of measurement methods for surface roughness

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

A Measurement System for the Roughness of Ultra Smooth Surface with Large Aperture

Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

Remote measurement of surface roughness, surface reflectance, and body reflectance with LiDAR

Surface Form Metrology of Micro-Optics

Single-Shot White-Light Dispersive Interferometric Profilometer

Real Time Measurement of Surface Roughness Using Laser Technique

Nanometer Scale Roughness Measurements with Atomic Force Microscopes

Surface Roughness Measurement Based on Non-Diffracting Beam Triangulation and Grey Evaluation

Non-Contact Surface Roughness Measurement by Implementation of a Spatial Light Modulator

New methods for measuring of surface landscape

Hybrid micro/nano-structure formation by angular laser texturing of Si surface for surface enhanced Raman scattering.

Fluorescence Record Diagnostics of 3D Rough-Surface Landscapes With Nano-Scale Inhomogeneities

Portable angle-resolved scattering system to measure high spatial frequency roughness for ultra-smooth surfaces

Surface-roughness measurement based on scalar field correlation with active millimeter-wave imaging system.

Challenges in the areal measurement of surface roughness and shape at the micro and nanoscale

A new optical technique for roughness measurement on moving surface

Compact Single-Shot Dual-Wavelength Interferometry for Large Object Measurement with Rough Surfaces

Light-Sheet Microscopy for Surface Topography Measurements and Quantitative Analysis