Abstract:We present a femtosecond laser-based interferometry for step-structure surface measurement with a large field of view. A height axial scanning range of 348 mu m is achieved by using the method of repetition frequency scanning with reference to the Rb atomic clock and the optical path length difference design for 21 times of the pulse interval. A combined method, which includes the envelope peak positioning method for rough measurement, synthetic-wavelength interferometry for connection, and carrier wave interferometry for fine measurement, is proposed to reconstruct the surface. A three-step specimen with heights of approximately 20, 50, and 70 mu m was successfully measured with a height precision of 7 nm, and the accuracy was verified by a commercial white light interferometer. The diameter of the field of view that was demonstrated was 17.3 mm, which could be much larger owing to the high spatial coherence of the femtosecond laser. The results show that the femtosecond laser system combines the step-structure measurement performance of white light interferometry and the high-precision large-field performance of phase shifting interferometry, indicating its potential for widespread use in ultra-precision manufacturing of micro/nano-devices, such as semiconductor chips, integrated circuits, and micro-electro-mechanical systems. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Light-Sheet Microscopy for Surface Topography Measurements and Quantitative Analysis

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Light Sheet Microscopy with High Spatial Resolution Based on Polarized Structured Illumination Beam Modulated by the Phase Mask

Axial Resolution Enhancement in Light Sheet Microscopy Using Mode Modulation

Isotropic three-dimensional imaging with lattice light-sheet difference microscopy.

Light Sheet Microscopy Using Line Scan Confocal with Bidirectional Bessel Beam Illumination

Exploratory Study on Light-Sheet Based Three-Dimensional Surface Topography

Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope

Line Laser Scanning Microscopy Based on the Scheimpflug Principle for High-Resolution Topography Restoration and Quantitative Measurement

Mechanically Sheared Axially Swept Light-Sheet Microscopy

Microscope vision system based on micro laser line scanning for characterizing microscale topography

Identification of Surface Topography Scanned by Laser Scanning Confocal Microscope

Light-sheet Based Two-Dimensional Scheimpflug Lidar System for Profile Measurements.

3D surface morphology imaging of opaque microstructures via light-field microscopy

Large-Scale and Non-Contact Surface Topography Measurement Using Scanning Ion Conductance Microscopy and Sub-Aperture Stitching Technique

Single-Lens Light-Sheet Fluorescence Microscopy Based on Micro-Mirror Array.

Confocal Microscope For 3d Surface Topography Based On Laser Array

Two-photon Three-Axis Digital Scanned Light-Sheet Microscopy (2P3A-DSLM)

Large-field step-structure surface measurement using a femtosecond laser

Development of A Multiprobe Instrument for Measuring Microstructure Surface Topography

Multi-view Object Topography Measurement with Optical Sectioning Structured Illumination Microscopy.