Silicon-Oxide Interfaces: Structure and Electronic Properties

Y. G. Fedorenko
DOI: https://doi.org/10.48550/arXiv.1709.01917
2017-09-06
Materials Science
Abstract:The paper reviews methods used to study the electronic and structural properties of silicon/insulator interfaces. Methodological approaches to study the interface states and charge trapping in the oxide are considered. An overview of archetypical structural defects of the Si/SiO2 interface is given.
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