Abstract:Photonic integrated circuits based on Lithium Niobate have demonstrated the vast capabilities afforded by material with a high Pockels coefficient, allowing linear and high-speed modulators operating at CMOS voltage levels for applications ranging from data-center communications and photonic accelerators for AI. However despite major progress, the industrial adoption of this technology is compounded by the high cost per wafer. Here we overcome this challenge and demonstrate a photonic platform that satisfies the dichotomy of allowing scalable manufacturing at low cost, while at the same time exhibiting equal, and superior properties to those of Lithium Niobate. We demonstrate that it is possible to manufacture low loss photonic integrated circuits using Lithium Tantalate, a material that is already commercially adopted for acoustic filters in 5G and 6G. We show that LiTaO3 posses equally attractive optical properties and can be etched with high precision and negligible residues using DUV lithography, diamond like carbon (DLC) as a hard mask and alkaline wet etching. Using this approach we demonstrate microresonators with an intrinsic cavity linewidth of 26.8 MHz, corresponding to a linear loss of 5.6 dB/m and demonstrate a Mach Zehnder modulator with Vpi L = 4.2 V cm half-wave voltage length product. In comparison to Lithium Niobate, the photonic integrated circuits based on LiTaO3 exhibit a much lower birefringence, allowing high-density circuits and broadband operation over all telecommunication bands (O to L band), exhibit higher photorefractive damage threshold, and lower microwave loss tangent. Moreover, we show that the platform supports generation of soliton microcombs in X-Cut LiTaO3 racetrack microresonator with electronically detectable repetition rate, i.e. 30.1 GHz.

Optical colorimetric LiTaO_3 wafers for high-precision lithography on frequency control of SAW devices

Single-Crystalline LiTaO 3 Film-Based High-Frequency Surface Acoustic Wave Resonators and Electronics Applications

Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

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Study on the Fabrication and Acoustic Properties of Near-Stoichiometric Lithium Tantalate Crystal Surface Acoustic Wave Filters

Preparation, Properties, and Applications of Near Stoichiometric Lithium Tantalate Crystals

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High-Performance Acoustic Wave Devices on LiTaO$_{3}$/SiC Hetero-Substrates

Influence of Chemical Reduction on Optical and Electrical Properties of LiTaO3 Crystal

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

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Preparation and mechanism of black LiTaO 3 wafer with controlled transmission efficiency of light and resistivity by reduction method

High Frequency, Low Loss and Low TCF Acoustic Devices on LiTaO3-on-SiC Substrate

High-Q integrated lithium tantalate microring resonators for on-chip comb generation

Preparation, electrical, thermal and mechanical properties of near-stoichiometric lithium tantalate wafers

Temperature stable amorphous-TeO2∕36°–46° Y-X LiTaO3 substrates for surface acoustic wave applications

Tunable and stable micro-ring resonator based on thin-film lithium tantalate

ZrO2-TiO2 thin films: A new material system for mid-infrared integrated photonics

Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates

Ultra-high-speed high-resolution laser lithography for lithium niobate integrated photonics