Large dynamic range in acoustic detection realized by a dual-diaphragm based sensing system with IQ-PGC phase demodulation

Guohui Lin,Jie Ma,Min Li,Ming-Yu Li,Haifei Lv,Xiaoyan Wen
DOI: https://doi.org/10.1109/jsen.2022.3160730
IF: 4.3
2022-01-01
IEEE Sensors Journal
Abstract:A dual-diaphragm based acoustic sensing system has been proposed to increase the dynamic range by using a thin diaphragm (70 nm) of gold diaphragm to decrease minimum detectable acoustic pressure and a thick one (300 nm) to increase maximum detectable acoustic pressure. Signals from the two diaphragms are synchronously demodulated using frequency division multiplexing (FDM) combined with an in-phase/quadrature (IQ) and a phase generated carrier (PGC) phase demodulation. Signal crosstalk from the two diaphragms is avoided by adding a carrier modulation frequency shift to one of them. The underwater sensing performance of the system is tested under the acoustic signals ranging from 100 to 1500 Hz. Experimental results demonstrate that the average dynamic range reaches 98.4 dB in 300 ~ 1500 Hz, which is obviously improved comparing to the sensor barely using a 70 nm diaphragm (81.2 dB) or a 300 nm one (74.2 dB). In addition, the sensor performs high and flat sensitivity under low acoustic pressure (less than 110 Pa) with an average phase sensitivity of −164.2±2.6 dB re 1 rad/ <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="3.37ex" height="1.676ex" style="vertical-align: -0.338ex;" viewBox="0 -576.1 1451 721.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use></g></svg></span> Pa. Due to the characteristic of large dynamic range and compact size, the proposed sensing system is believed to have potential application prospects in acoustic detection area.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-6D" d="M21 287Q22 293 24 303T36 341T56 388T88 425T132 442T175 435T205 417T221 395T229 376L231 369Q231 367 232 367L243 378Q303 442 384 442Q401 442 415 440T441 433T460 423T475 411T485 398T493 385T497 373T500 364T502 357L510 367Q573 442 659 442Q713 442 746 415T780 336Q780 285 742 178T704 50Q705 36 709 31T724 26Q752 26 776 56T815 138Q818 149 821 151T837 153Q857 153 857 145Q857 144 853 130Q845 101 831 73T785 17T716 -10Q669 -10 648 17T627 73Q627 92 663 193T700 345Q700 404 656 404H651Q565 404 506 303L499 291L466 157Q433 26 428 16Q415 -11 385 -11Q372 -11 364 -4T353 8T350 18Q350 29 384 161L420 307Q423 322 423 345Q423 404 379 404H374Q288 404 229 303L222 291L189 157Q156 26 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 112 181Q151 335 151 342Q154 357 154 369Q154 405 129 405Q107 405 92 377T69 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-75" d="M21 287Q21 295 30 318T55 370T99 420T158 442Q204 442 227 417T250 358Q250 340 216 246T182 105Q182 62 196 45T238 27T291 44T328 78L339 95Q341 99 377 247Q407 367 413 387T427 416Q444 431 463 431Q480 431 488 421T496 402L420 84Q419 79 419 68Q419 43 426 35T447 26Q469 29 482 57T512 145Q514 153 532 153Q551 153 551 144Q550 139 549 130T540 98T523 55T498 17T462 -8Q454 -10 438 -10Q372 -10 347 46Q345 45 336 36T318 21T296 6T267 -6T233 -11Q189 -11 155 7Q103 38 103 113Q103 170 138 262T173 379Q173 380 173 381Q173 390 173 393T169 400T158 404H154Q131 404 112 385T82 344T65 302T57 280Q55 278 41 278H27Q21 284 21 287Z"></path></defs></svg>
engineering, electrical & electronic,instruments & instrumentation,physics, applied
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