Highly Sensitive Interlocked Piezoresistive Sensors Based on Ultrathin Ordered Nanocone Array Films and Their Sensitivity Simulation
Yawen Lu,Yin He,Jutao Qiao,Xin Niu,Xiaojiu Li,Hao Liu,Li Liu
DOI: https://doi.org/10.1021/acsami.0c16456
2020-11-30
Abstract:Achieving a continuously adjustable micro–nanostructure of sensing materials is crucial and still a challenge for the flexible pressure sensor. We proposed a new method to prepare ultrathin ordered nanocone array films by designing tunable tapered anodized aluminum oxide templates and to prepare highly sensitive flexible pressure sensors by the interlocking nanocone arrays. Meanwhile, the theoretical prediction model of the sensitivity of interlocked nanocone arrays is proposed, and its result shows that the resistance change rate is positively correlated with the height of interlocked nanocone arrays and the contact area between interlocked nanocones. According to the finite element simulation and experimental results, the interlocked ordered nanocone array pressure sensor exhibits a high sensitivity of 268.36 kPa<sup>–1</sup> in the pressure range of 0–200 Pa, an ultralow detection limit of 0.98 Pa, a fast response/recovery time of 48/56 ms, a low hysteresis of ±3.156%, stability under 5000 cycles of loading, and continuity and repeatability under different loads and loading speeds. Furthermore, the pressure sensor can accurately monitor weak wind velocities, wrist torsion and bending movement, and book opening and closing angles. The sensor has broad application prospects in wearable medical monitoring, electronic skin, and human–computer interaction.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsami.0c16456?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsami.0c16456</a>.Calculation of theoretical resistance, schematic illustration of the preparation of t-AAO, FESEM images of the OCA with heights of 750 and 460 nm, dimensions of four different finite element geometry structures of the OCA in the side view and in the 45 °C angle view, key parameters of recently reported micro–nanostructure sensors and interlocked microstructured sensors, resistance variations at a pressure of 2 kPa with different applying speeds, and resistance variations of the IOCA with different angles (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c16456/suppl_file/am0c16456_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.
materials science, multidisciplinary,nanoscience & nanotechnology