Abstract:Slicing and post-treatment of SiC crystals have been a significant challenge in the integrated circuit and microelectronics industry. To compete with wire-sawing and mechanical grinding technology, a promising approach combining laser slicing and laser polishing technologies has been innovatively applied to increase utilization and decrease damage defects for single crystal 4H-SiC. Significant material utilization has been achieved in the hybrid laser processes, where material loss is reduced by 75% compared to that of conventional machining technologies. Without any special process control or additional treatment, an internally modified layer formed by laser slicing can easily separate the 4H-SiC crystals using an external force of about similar to 3.6 MPa. The modified layer has been characterized using a micro-Raman method to determine residual stress. The sliced surface exhibits a combination of smooth and coarse appearances around the fluvial morphology, with an average surface roughness of over Sa 0.89 pm. An amorphous phase surrounds the SiC substrate, with two dimensions of lattice spacing, d = 0.261 nm and d = 0.265 nm, confirmed by high-resolution transmission electron microscopy (HRTEM). The creation of laser-induced periodic surface nanostructures in the laser-polished surface results in a flatter surface with an average roughness of less than Sa 0.22 pm. Due to the extreme cooling rates and multiple thermal cycles, dissociation of Si-C bonding, and phase separation are identified on the laser-polished surface, which is much better than that of the machining surface. We anticipate that this approach will be applicable to other high-value crystals and will have promising viability in the aerospace and semiconductor industries.(c) 2023 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.

Liquid-assisted femtosecond laser-induced LIPSS on the surface of YT15 cemented carbide and its mechanical properties

Chemical effects during the formation of various types of femtosecond laser-generated surface structures on titanium alloy

Analysis of synergistic friction reduction effect on micro-textured cemented carbide surface by laser processing

Fabrication of Interference Textures on Cemented Carbides Using Nanosecond and Femtosecond Laser Pulses

Investigating the correlation between surface wettability and morphology parameters of femtosecond laser processed on YT15

Liquid-Assisted Femtosecond Laser Precision-Machining of Silica.

Influence of surface morphology on processing of C/SiC composites via femtosecond laser

Investigations on femtosecond laser-induced surface modification and periodic micropatterning with anti-friction properties on Ti6Al4V titanium alloy

Fabrication and mechanical measurements of micro- and nano-textured surfaces induced by laser processing

Femtosecond laser surface modification of 4H-SiC improves machinability

Effects of laser polishing on surface morphology and mechanical properties of additive manufactured TiAl components

Effects of Laser Shock Processing on Morphologies and Mechanical Properties of ANSI 304 Stainless Steel Weldments Subjected to Cavitation Erosion

Impact of Laser Shock Processing on Microstructure and Tribological Performance of GCr15 Bearing Steel

Formation Mechanism of Surface Morphology in the Process of CO2 Pulsed Laser Processing of Fused Silica Optics

Surface morphology evolution and tribological behavior in nanosecond pulsed laser polishing of S136 mold steel

Femtosecond laser surface modification coupling with surface metallurgical reaction promotes surface plasticity of SiC

Research on Laser-Assisted Micro-Milling of Fused Silica

Morphology evolution mechanisms and localized structural modification of repaired sites on fused silica optics processed by CO2 laser rapid ablation mitigation

Laser-assisted grinding of RB-SiC composites: Laser ablation behavior and mechanism

Design of Metal-Based Slippery Liquid-Infused Porous Surfaces (slipss) with Effective Liquid Repellency Achieved with a Femtosecond Laser

Surface Micromorphology and Nanostructures Evolution in Hybrid Laser Processes of Slicing and Polishing Single Crystal 4H-Sic