Abstract:Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a powerful chemical characterization technique allowing for the distribution of all material components (including light and heavy elements and molecules) to be analyzed in 3D with nanoscale resolution. Furthermore, the sample's surface can be probed over a wide analytical area range (usually between 1 μm2 and 104 μm2) providing insights into local variations in sample composition, as well as giving a general overview of the sample's structure. Finally, as long as the sample's surface is flat and conductive, no additional sample preparation is needed prior to TOF-SIMS measurements. Despite many advantages, TOF-SIMS analysis can be challenging, especially in the case of weakly ionizing elements. Furthermore, mass interference, different component polarity of complex samples, and matrix effect are the main drawbacks of this technique. This implies a strong need for developing new methods, which could help improve TOF-SIMS signal quality and facilitate data interpretation. In this review, we primarily focus on gas-assisted TOF-SIMS, which has proven to have potential for overcoming most of the aforementioned difficulties. In particular, the recently proposed use of XeF2 during sample bombardment with a Ga+ primary ion beam exhibits outstanding properties, which can lead to significant positive secondary ion yield enhancement, separation of mass interference, and inversion of secondary ion charge polarity from negative to positive. The implementation of the presented experimental protocols can be easily achieved by upgrading commonly used focused ion beam/scanning electron microscopes (FIB/SEM) with a high vacuum (HV)-compatible TOF-SIMS detector and a commercial gas injection system (GIS), making it an attractive solution for both academic centers and the industrial sectors.

Identifying Process Differences with ToF-SIMS: An MVA Decomposition Strategy

Surface Analysis of Photolithographic Patterns Using Tof-Sims and Pca

Exploring the Performance of Linear and Nonlinear Models of Time-of-Flight Secondary Ion Mass Spectrometry Spectra

ToF-SIMS Investigation of Environmental Effects on Analyte Migration in Matrix Coatings for Mass Spectrometry Imaging Using a Newly Developed Vapor Deposition System

The Application of a Random Forest Classifier to ToF-SIMS Imaging Data

THz Spectroscopic Decomposition and Analysis in Mixture Inspection Using Soft Modeling Methods

Principal Component Analysis (PCA) of Surface Contamination by TOF-SIMS

A Quick and Effective Multivariate Statistical Strategy for Imaging Mass Spectrometry

Evaluation of a Commercial TIMS-Q-TOF Platform for Native Mass Spectrometry

Identification of a lipid‐related peak set to enhance the interpretation of TOF‐SIMS data from model and cellular membranes

The spectral resolution of unknown mixture based on THz spectroscopy with self-modeling technique

A Multimodal SIMS/MALDI Mass Spectrometry Imaging Source with Secondary Electron Imaging Capabilities for Use with timsTOF Instruments

Time‐of‐flight secondary ion mass spectrometry and X‐ray photoelectron spectroscopy protocol for the analysis of organic multilayers

A Universal Strategy for Quantitative Decomposition of Multicomponent System Via Spectra

Review of Recent Advances in Gas-Assisted Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry (FIB-TOF-SIMS)

Processing Next-Generation Mass Spectrometry Imaging Data: Principal Component Analysis at Scale

An evaluation of static ToF-SIMS analysis of environmental organics

Revisiting Dissolved Organic Matter Analysis Using High-Resolution Trapped Ion Mobility and FT-ICR Mass Spectrometry

High Mass Resolution Multireflection Time-of-Flight Secondary Ion Mass Spectrometer

Based on SIMION Simulation to Identify Peaks of High-Field Asymmetric Waveform Ion Mobility Spectrometry Spectra