Abstract:Electrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis of the dynamic stability of such systems. In this paper, we take a major step towards mending the situation. By combining the finite element method (FEM) with an arc-length solver, we obtain the full bifurcation diagram for electrostatic actuators based on prismatic Euler-Bernoulli beams. A subsequent modal analysis then shows that within very narrow error margins, it is exclusively the lowest Euler-Bernoulli eigenmode that dominates the beam physics over the entire relevant drive voltage range. An experiment directly recording the deflection profile of a MEMS microbeam is performed and confirms the numerical findings with astonishing precision. This enables modeling the system using a single spatial degree of freedom.

RF-MEMS beam components : FEM modelling and experimental identification of pull-in in presence of residual stress

Analytical model of electrostatic fixed-fixed microbeam for pull-in voltage

Residual stress measurement method in MEMS microbeams using frequency shift data

Experimental Characterization of the static behaviour of microcatntilevers electrostatically actuated

Modeling of gold microbeams as strain and pressure sensors for characterizing MEMS packages

The Timoshenko Beam Theory based Spectral Finite Element to Analyse Effects of Shear Deformation on Electrostatically Actuated Narrow Thick Clamped Microbeams

A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structure

A simple analytical method for residual stress measurement on suspended MEM structures using surface profilometry

Dynamic Flexoelectric Actuation and Vibration Control of Beams

Coulomb actuated microbeams: A Chebyshev-Edgeworth approach to highly efficient lumped parameter models

Multiflexoelectric Actuation and Control of Beams

Pull-in voltage analysis for an electrostatically actuated extensional microbeam with large deflection

Investigation of stress rupture properties of micro beams using the piezoresistive effect

Dimension effect on mechanical behavior of silicon micro-cantilever beams

Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation

Improved Model of Residual Stress on Top Electrode Membrane of Fixed-Fixed Beam RF MEMS Switches

Measurement of young's modulus and residual stress of nanobeam using AFM

Post Buckling of Micromachined Beams

Characterization of Residual Stress in SOI Wafers by Using MEMS Cantilever Beams

Analysis and Measurement of Residual Stress in Bridge Membrane MEMS Relays

Theoretical Analysis and Simulation of Thermoelastic Deformation of Bimorph Microbeams