Strained Si Nanosheet pFET Based on SiC Strain Relaxed Buffer Layer for High Performance and Low Power Logic Applications

Kun Chen,Jingwen Yang,Chunlei Wu,Chen Wang,Min Xu,David Wei Zhang
DOI: https://doi.org/10.1109/access.2023.3287148
IF: 3.9
2023-07-08
IEEE Access
Abstract:The application of SiC-based strain-relaxed buffers (SRB) technology in gate-all-around (GAA) pMOS nanosheet transistors (NS-FETs) fabrication has been systematically investigated. TCAD simulation results show that SiC SRB can effectively enhance the p-channel stress, up to 3.8Gpa has been achieved without S/D parasitic RC degradation. Furthermore, introducing a wide-bandgap SiC layer underneath NS-FET can help suppress the bottom parasitic transistor. The SiC SRB technology presents a integrated and streamlined approach for addressing the major performance bottlenecks of NS-FETs and is a potential solution for developing future NS-FET based high-performance and low-power logic applications.
computer science, information systems,telecommunications,engineering, electrical & electronic
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