Abstract:Using microfabrication technologies is a prerequisite to create scaffolds of reproducible geometry and constant quality for three-dimensional cell cultivation. These technologies offer a wide spectrum of advantages not only for manufacturing but also for different applications. The size and shape of formed cell clusters can be influenced by the exact and reproducible architecture of the microfabricated scaffold and, therefore, the diffusion path length of nutrients and gases can be controlled.1 This is unquestionably a useful tool to prevent apoptosis and necrosis of cells due to an insufficient nutrient and gas supply or removal of cellular metabolites. Our polymer chip, called CellChip, has the outer dimensions of 2 x 2 cm with a central microstructured area. This area is subdivided into an array of up to 1156 microcontainers with a typical dimension of 300 m edge length for the cubic design (cp- or cf-chip) or of 300 m diameter and depth for the round design (r-chip).2 So far, hot embossing or micro injection moulding (in combination with subsequent laborious machining of the parts) was used for the fabrication of the microstructured chips. Basically, micro injection moulding is one of the only polymer based replication techniques that, up to now, is capable for mass production of polymer microstructures.3 However, both techniques have certain unwanted limitations due to the processing of a viscous polymer melt with the generation of very thin walls or integrated through holes. In case of the CellChip, thin bottom layers are necessary to perforate the polymer and provide small pores of defined size to supply cells with culture medium e.g. by microfluidic perfusion of the containers. In order to overcome these limitations and to reduce the manufacturing costs we have developed a new microtechnical approach on the basis of a down-scaled thermoforming process. For the manufacturing of highly porous and thin walled polymer chips, we use a combination of heavy ion irradiation, microthermoforming and track etching. In this so called "SMART" process (Substrate Modification And Replication by Thermoforming) thin polymer films are irradiated with energetic heavy projectiles of several hundred MeV introducing so-called "latent tracks" Subsequently, the film in a rubber elastic state is formed into three dimensional parts without modifying or annealing the tracks. After the forming process, selective chemical etching finally converts the tracks into cylindrical pores of adjustable diameter.

Sacrificial Template Replication: Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Three-dimensional printing of silica-glass structures with submicrometric features

Sub‐Micron Replication of Fused Silica Glass and Amorphous Metals for Tool‐Based Manufacturing

Two‐Photon Polymerization of Nanocomposites for the Fabrication of Transparent Fused Silica Glass Microstructures

High-throughput injection molding of transparent fused silica glass

Three-dimensional printing of transparent fused silica glass

Precise and Rapid Replication of Complex‐Shaped Fused Silica Optics

Micro Fabrication of Micro Fluidic Glass Chip Without Clean Room Condition

One-photon three-dimensional printed fused silica glass with sub-micron features

3D glass-ceramic templates for micro-/nano-optics realized via laser nanolithography and pyrolysis

Direct additive manufacturing of transparent fused silica glasses using an integrated paste printing and laser in-situ melting technology

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

A sinterless, low-temperature route to 3D print nanoscale optical-grade glass

Glass Molding for Microstructures

Microfabrication of chip-sized scaffolds for three-dimensional cell cultivation

Volumetric Additive Manufacturing of Silica Glass with Microscale Computed Axial Lithography

Optical Fabrication of Three-Dimensional Polymeric Microstructures

Low-Temperature Additive Manufacturing of Silica Glass Composites

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Capabilities and Limits to Form High Aspect-Ratio Microstructures by Molding of Borosilicate Glass