3D glass-ceramic templates for micro-/nano-optics realized via laser nanolithography and pyrolysis

D. Gailevičius,L. Jonušauskas,D. Sakalauskas,S. Šakirzanovas,R. Gadonas,V. Mizeikis,K. Staliunas,S. Juodkazis,M. Malinauskas,D. Gailevicius,L. Jonusauskas,S. Sakirzanovas
DOI: https://doi.org/10.1109/cleoe-eqec.2017.8087094
2017-06-01
Abstract:Ceramics play an important role in today's science and industry as it can withstand immense heat, mechanical and other hazards. For this reason, there is a constant drive to find new ways to acquire more free-form and sophisticated ceramic structures. Recently, stereolithographic 3D printing of hybrid organic-inorganic photopolymer and subsequent heat treatment was demonstrated to be capable of providing true 3D ceramic structures [1]. However, such approach was limited to millimeter scale, while one of the aims in the field of micro-and nano-optics is to acquire functional 3D ceramic structures in micro-or even nano-dimensions, respectively.
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