Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Two‐Photon Polymerization of Nanocomposites for the Fabrication of Transparent Fused Silica Glass Microstructures

Beyond 100 nm Resolution in 3D Laser Lithography: Post Processing Solutions

High‐Resolution Structuring of Silica‐Based Nanocomposites for the Fabrication of Transparent Multicomponent Glasses with Adjustable Properties

Three-dimensional printing of silica-glass structures with submicrometric features

High‐Resolution Structuring of Silica‐Based Nanocomposites for the Fabrication of Transparent Multicomponent Glasses with Adjustable Properties (Adv. Mater. 44/2024)

One-photon three-dimensional printed fused silica glass with sub-micron features

A sinterless, low-temperature route to 3D print nanoscale optical-grade glass

Femtosecond laser micromachining and microfabrication in transparent materials

Fabrication of micro-structures for optically driven micromachines using two-photon photopolymerization of UV curing resins

High-Resolution 3D Fabrication of Glass Fiber-Reinforced Polymer Nanocomposite (FRPN) Objects by Two-Photon Direct Laser Writing

Three-dimensional printing of transparent fused silica glass

Ultrafast Laser 3D Nanolithography of Fiber-Integrated Silica Microdevices

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Sacrificial Template Replication: Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Silica‐Rich Sol‐Gel Ink for Two‐Photon Direct Laser Writing of Microscale Structures and Optical Elements

Photonic Crystal Structures with Submicrometer Spatial Resolution Achieved by High-Power Femtosecond Laser-Induced Photopolymerization

Two-Photon Polymerization of Hybrid Sol-Gel Materials for Photonics Applications

Manufacturing of Functional Polymer Micro- and Nano-Structures by Femtosecond Laser Pulse

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.

3D Manufacturing of Glass Microstructures Using Femtosecond Laser