Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Sustainable Fabrication of Glass Nanostructures Using Infrared Transparent Mold Assisted by CO2 Laser Scanning Irradiation

Fabrication of Cross-Sinusoidal Anti-Reflection Nanostructure on a Glass Substrate Using Imperfect Glass Imprinting with a Nano-Pin Array Vitreous Carbon Stamp

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Solution Processing and Resist‐Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic–Organic Hybrid Photonic Integration

Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators on nonconventional plastic substrates

Microfabrication and Surface Functionalization of Soda Lime Glass through Direct Laser Interference Patterning

Single-step maskless nano-lithography on glass by femtosecond laser processing

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Direct additive manufacturing of transparent fused silica glasses using an integrated paste printing and laser in-situ melting technology

Enabling Sustainability in Glass Optics Manufacturing by Wafer Scale Molding

High-throughput injection molding of transparent fused silica glass

Glass Molding for Microstructures

Glass etching to bridge micro- and nanofluidics.

Femtosecond pulsed laser micro-machining of glass substrates with application to microfluidic devices

Incubation Induced Light Concentration Beyond the Diffraction Limit for High-Resolution Glass Printing

Three-dimensional Nanostructuring of Transparent Materials by the Femtosecond Laser Irradiation

Fabrication of Glass‐Ceramic 3D Micro‐Optics by Combining Laser Lithography and Calcination

Study on nano-graphitic carbon coating on Si mold insert for precision glass molding

Micro-optical elements from optical-quality ZIF-62 hybrid glasses by hot-imprinting

Emerging Techniques for Customized Fabrication of Glass