Abstract:The evolution of surface morphologies of films prepared by ion-based deposition techniques has been investigated by atomic force microscopy. Two deposition processes, filtered arc deposition (FAD) and ion-beam-assisted deposition, where low-energy (<100 eV) ion irradiation and high-energy (several tens of keV) ion-beam bombardment concurrent with film growth were involved, respectively, have been employed to prepare TiN and Al films. Comparative studies on the effect of energetic ions on the development of topography have been performed between the low-ion-energy regime and high-ion-energy regime. In addition, the relationship between topography and mechanical properties of thin films has been revealed, by involving thin films prepared by thermal evaporation deposition (TED), where almost all depositing particles are neutral. In the images of the TED TiN and Al films, a large number of porous and deep boundaries between columnar grains was observed, suggesting a very rough and loose surface. In contrast, the FAD films exhibited much denser surface morphologies, although still columnar. The root-mean-square roughness of the FAD films was less than 1 Å. Hardness test and optical parameter measurement indicated that the FAD films were much harder and, in the case of optical films, much more transparent than the TED films, which was considered to arise from the denser surface morphologies rather than crystallization of the films. The high density and super smoothness of the FAD films, and the resultant mechanical and optical properties superior to those of the TED films, were attributed to the enhancement of surface migration of the deposited adatoms in the FAD process, which could provide intensive low-energy ion irradiation during film growth. As for topography modification by high-energy ion-beam bombardment concurrent with film growth, in addition to the increase of surface diffusion due to elastic collision and thermal spikes, physical sputtering must be considered while explaining the development of the film topography. Both surface migration enhancement and sputtering played important roles in the case of high-energy heavy-ion-beam bombardment, under which condition surface morphology characterized by dense columns with larger dimension and deep clean boundaries was formed. However, under high-energy light-ion-beam bombardment, the sputtering was dominant, and the variation of sputtering coefficient with position on the surface of growing film led to the formation of cones.

Ion beam sputtering induced ripple formation in thin metal films

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Non-linear ripple dynamics on amorphous surfaces patterned by ion-beam sputtering

Ripple pattern formation on silicon carbide surfaces by low-energy ion-beam erosion

Nanoscale Pattern Formation in Pt Thin Films Due to Ion-Beam-Induced Dewetting

Ripples and Ripples: from Sandy Deserts to Ion-Sputtered Surfaces

A Monte Carlo study of surface sputtering by dual and rotated ion beams

Structure Formation on the Surface of Alloys Irradiated by Femtosecond Laser Pulses

Ion-induced nanopatterns on semiconductor surfaces investigated by grazing incidence x-ray scattering techniques

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Manipulating liquid metal flow for creating standalone structures with micro-and nano-scale features in a single step

Femtosecond laser induced surface structures on amorphous alloys

Ripple formation on TA2 pure titanium surface induced by annular laser beam at low pressure environment

Coherent Atomic-Scale Ripples on Metallic Glasses Patterned by Low-Energy Ion Irradiation for Large-Area Surface Structuring

Nanostructuring, fractal characterization and wettability of ion irradiated Au thin films and their thickness effect

Ion sputtering nanostructuring crystalline MgF2 surface and its energy-dependent surface roughness

Formation of Fe Nano-Ripples and Nano-Structures on Si Surfaces Induced by Ion bombardment

Patterning Of Metal Nanowires By Directed Ion-Induced Dewetting

Atomic Force Microscopy Study on Topography of Films Produced by Ion-Based Techniques

Periodic Surface Structures Induced by Femtosecond Laser Single Pulse and Pulse Trains on Metals

Morphology of Ion-Sputtered Surfaces