Morphological Transitions in Nanoscale Patterns Produced by Concurrent Ion Sputtering and Impurity Co-deposition

R. Mark Bradley

DOI: https://doi.org/10.1063/1.4945678

2016-02-10

Abstract:We modify the theory of nanoscale patterns produced by ion bombardment with concurrent impurity deposition to take into account the effect that the near-surface impurities have on the collision cascades. As the impurity concentration is increased, the resulting theory successively yields a flat surface, a rippled surface with its wavevector along the projected direction of ion incidence, and a rippled surface with its wavevector rotated by 90 degrees. Exactly the same morphological transitions were observed in recent experiments in which silicon was bombarded with an argon ion beam and gold was co-deposited [B.~Moon et al. <a class="link-https" data-arxiv-id="1601.02534" href="https://arxiv.org/abs/1601.02534">arXiv:1601.02534</a> (2016)].

Materials Science

What problem does this paper attempt to address?

The problem that this paper attempts to solve is the mechanism of surface topography transformation during ion bombardment and impurity co - deposition. Specifically, the paper focuses on the transformation process of the surface topography from flat to parallel ripples and then to vertical ripples as the gold concentration increases when the silicon surface is bombarded by an argon ion beam and gold atoms are deposited simultaneously. This phenomenon could not be explained by previous theories because these theories did not take into account the influence of near - surface impurities on the collision cascade. By modifying the Sigmund sputtering model and introducing the factor of the influence of near - surface impurities on the collision cascade, the paper is able to explain the experimentally observed phenomena.

### Main contributions of the paper:
1. **Modification of the Sigmund sputtering model**: The paper proposes a generalized Sigmund model, which takes into account the influence of near - surface impurities on the collision cascade.
2. **Explanation of experimental phenomena**: Through this new model, the paper successfully explains the topography transformation phenomenon observed in Moon et al.'s experiment, that is, as the gold concentration increases, the surface topography changes from flat to parallel ripples and then to vertical ripples.
3. **Theoretical analysis**: Through linear stability analysis, the paper derives the equations of motion describing the changes in surface height and surface composition, and analyzes the solutions of these equations to verify the validity of the model.

### Key formulas:
- **Energy deposition density**:
\[
E(r)=\frac{\epsilon}{(2\pi)^{3/2}\alpha\beta^{2}}\exp\left(-\frac{\rho_{\parallel}^{2}}{2\alpha^{2}}-\frac{\rho_{\perp}^{2}}{2\beta^{2}}\right)
\]
where,
\[
\rho_{\parallel}=a + x\sin\theta+z\cos\theta
\]
\[
\rho_{\perp}=\sqrt{(x\cos\theta - z\sin\theta)^{2}+y^{2}}
\]

- **Equations of motion**:
\[
\frac{\partial h}{\partial t}=-\Omega(F_{A}+F_{B}-F_{d}+\nabla\cdot J_{A}+\nabla\cdot J_{B})
\]
\[
\Delta\frac{\partial c_{s}}{\partial t}=-\Omega(F_{A}-F_{d}+\nabla\cdot J_{A})
\]

- **Linearized equations of motion**:
\[
u_{t}=C_{1}u_{xx}+C_{2}u_{yy}-D\nabla^{2}\nabla^{2}u+\alpha u_{x}
\]
\[
\phi_{t}=-A'\phi + C'_{1}u_{xx}+C'_{2}u_{yy}-D'\nabla^{2}\nabla^{2}u+\alpha'u_{x}+\beta'\phi_{x}
\]

Through these formulas and theoretical analysis, the paper successfully explains the topography transformation phenomenon observed in the experiment, providing a new theoretical basis for understanding the surface topography evolution during ion bombardment and impurity co - deposition.