Modeling, properties, and fabrication of a micromachined thermoelectric generator

Hartmut Uebensee,Manfred Reiche,Hans Kosina,Xuemei Xu,Hartmut S. Leipner,Geert Brokmann,Bernhard Schwartz,Anna Reinhardt,Thomas Ortlepp
DOI: https://doi.org/10.1063/5.0179769
IF: 1.697
2024-01-01
AIP Advances
Abstract:Different electrical and thermoelectric properties of a Si-based thermoelectric generator (TEG) are described based on the Kubo–Greenwood formalism. Temperature and doping dependence, phonon scattering (acoustic and optical phonons), and scattering on impurities are included. Comparisons with experimentally verified data confirm the validity of the model. Experimental studies were carried out on a micromechanically fabricated TEG. Devices were realized using a standard CMOS SOI technology in a lateral geometry. All thermopiles are located on a thin membrane to reduce the heat flow. The thickness of the membrane was adjusted between 20 and 30 μm ensuring also sufficient mechanical stability. Measurements on individual devices confirm the results of the theoretical model. The Seebeck coefficient was calculated and experimentally measured as S = 0.5 mV/K at an acceptor level of 1019 cm−3 at room temperature. The power factor is S2 · σ = 0.0073 W/mK2.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
What problem does this paper attempt to address?
The paper primarily focuses on the issues related to micro thermoelectric generators (TEGs), specifically including the following aspects: 1. **Theoretical Model**: The paper proposes a theoretical model based on the Kubo-Greenwood formalism to describe the electrical and thermoelectric properties of highly doped p-type silicon materials. The model considers factors such as phonon scattering, non-polar optical phonon scattering, and impurity scattering, and analyzes each valence band separately. 2. **Material Properties**: Through theoretical calculations, the paper explores the impact of doping concentration on resistivity, carrier mobility, Seebeck coefficient, and power factor. These calculation results are compared with experimental data to validate the model's effectiveness. 3. **Device Fabrication and Testing**: A lateral structure micro thermoelectric generator was fabricated using standard CMOS technology. All thermocouples are located on the film to reduce heat conduction. The stable temperature gradient on the film was verified using lock-in thermography, and the open-circuit voltage and short-circuit current at different doping levels were measured. 4. **Performance Evaluation**: The specific power generation capacity of the device was measured and compared with nanostructured silicon thermocouples and other high-performance thermoelectric materials, finding its performance to be comparable. In summary, the paper aims to improve the efficiency and performance of micro thermoelectric generators through theoretical modeling and experimental validation, particularly for waste heat recovery applications near room temperature.