Spectroscopic ellipsometry to characterize the Transition-Metal dichalcogenides single crystals doping concentration

Qimeng Sun,Junbo Yang,Shizhao Wang,Wei Shen,Jianping Shi,Yi Song
DOI: https://doi.org/10.1016/j.optlastec.2024.110633
IF: 4.939
2024-02-01
Optics & Laser Technology
Abstract:Two-dimensional (2D) semiconductors are among the best candidates for next-generation nanoelectronics , effectively addressing the issues encountered with transistors smaller than 1 nm. Wafer-scale 2D metal-doped semiconductor materials such as Fe-MoS 2 and Fe-WS 2 have been successfully developed and synthesized. Before applying these 2D materials to integrated circuits, fast and non-destructive determination of the doping concentration becomes a core issue and a major challenge. In this study, a new method for doping concentration characterization was developed using Mueller matrix spectroscopy, which is a fast and non-destructive method. Centimeter-scale monolayer MoS 2 films doped with different Fe concentrations were synthesized via chemical vapor deposition. The Mueller matrix spectra (300–1000 nm) of monolayer Fe-MoS 2 thin films with different doping concentrations were measured using two ellipsometry methods, and the doping concentration was classified using single-channel deep learning with an accuracy of 93 %. Finally, multi-channel training was performed using multiple valid Mueller matrix elements to improve the recognition accuracy. The proposed method should advance the development of 2D semiconductors on integrated circuits.
optics,physics, applied
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