Power Mems and Microengines

A. H. Epstein,S. D. Senturia,G. Anathasuresh,A. Ayon,K. Breuer,K-S. Chen,F. E. Ehrich,G. Gauba,R. Ghodssi,C. Groshenry
DOI: https://doi.org/10.21236/ada451178
1997-06-01
Abstract:MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/ hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.
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