Design and Fabrication of a Silicon-Based Micro Combustor for Micro Gas Turbine Engine

SHAN Xue-chuan,JIN Yu-feng,WANG Zhen-feng,MAEDA R
DOI: https://doi.org/10.3969/j.issn.1672-6030.2005.03.010
2005-01-01
Nanotechnology and Precision Engineering
Abstract:Micro gas turbine engine, consisting of a micro combustor, a compressor and a radial inflow turbine, is a promising power generator for micro and nano systems. This paper reports on design and fabrication of a silicon-based micro combustor for micro gas turbine engine. The design employs an extended flow path for preventing heat loss of micro combustion chamber and effectively preheating fuel and air. The first prototype of the implemented micro combustor consists of seven silicon wafers and is fabricated using deep reactive ion etching (DRIE) process. The size of the prototype measures 21.5 mm × 21.5 mm ×4.4 mm after being assembled. The developed combustor has been ignited and tested using hydrogen as its fuel. The developed combustor will have the same configuration as a gas turbine engine after adding rotating rotors for compressor as well as turbine.
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